Correlating Atom Probe Crystallographic Measurements 285
reconstruction parameters and same pole selection. The third measurement is for the calibrated reconstruction using a different selection of poles. The average minimum misorientation angle/axis pair calculated from the calibrated reconstruction with different pole selections, is 40.7°/[0.045 0.198 0.979]. The misorientation angle and axis deviate 0.7° and 2.6°, respectively, from the TKD results.
Reflectron Fitted Atom Probe Analyses Versus TKD Misorientation Measurements
A similar crystallographic analysis procedure was then undertaken for the technically pure Mo specimen. Figure 4a shows the calibrated atom probe reconstruction collected for the sample (ICF = 1.28, kf = 2.56, ε = 0.37, L = 40mm). Strong segregation of theNand P impurity species can be seen at the grain boundary running down the centre of the recon- struction. Once again, pole and zone line structure could be observed throughout the reconstruction, although this was weaker than in the previous example (Figs. 4b, 4f). Density maps from approximately one million atom slices of two regions within the reconstruction have been used. It was still possible to index individual poles and clear periodicity of lat- tice planes was observed within these regions as indicated by the POE and SDMs (Figs. 4c–4e, 4g–4i). Using this informa- tion, the orientation of each grain, as well as the misorienta- tion between them, could be calculated using the method described in the previous section. These measurements could then be compared directly to those fromthe TKDmaps taken of the tip before the atom probe experiment. Figure 5 shows a comparison between the TKDand APT
analyses of the same grain boundary region. Once again, the grains have been colored according to the crystallographic direction in the vertical direction, as measured from both techniques. Figure 5a shows four TKD maps of the specimen at projections spaced ~90° apart, the relative measured orientation of each grain is also provided. Figure 5b shows the corresponding 3D orientation maps of the APT reconstruc- tion, also at four projections spaced ~90°
apart.Amovie of the 3D orientationmap of the reconstruction can be found in the Supplementary Material (movie file 2). The coloring from each technique is very similar, indicating close agreement in the crystallographic measurements and facilitates easy com- parison between the two results.A1Dconcentration profile of the impurity elements along the direction normal to the grain boundary is also provided, which again highlights the ability to combine very precise atomic chemical and crystallographic information of individual grain boundaries with this analysis approach. A summary of the minimum misorientation measure-
ments is given in Table 2. As done earlier, the average orientation of each grain was calculated and a minimum misorientation was measured using these values. Three separate measurements of the same boundary in the atom probe data were conducted from the calibrated reconstruc- tion, non-calibrated reconstruction, and the calibrated
reconstruction with a different selection of poles. The aver- age minimum misorientation angle, calculated from the measurements taken on the calibrated reconstruction with different pole selections, is 33.4°/[0.099 0.640 0.761]. The misorientation angle and axis deviate 1.4° and 5.7°, respec- tively, from the TKD result.
DISCUSSION
Angular Resolution From the presented results, it was possible to gain insight into the angular resolution of orientation and misorientation mea- surements made directly from APT reconstructions through the use of complementary TKD results on the same tip speci- men. Such information is useful, because APT crystallographic studies are starting to become popular as ameans of combining atomic scale chemical and crystallographic measurements across individual grain boundaries, yet there has been limited investigation into the accuracy of such measurements. It is importanttopoint outthat the angularresolutionofTKD, while significantly high, still has amargin of error. A quick way to estimate this error is to perform a transect across a defor- mation free grain and view the pixel to pixel misorientation data. For the data presented, this was found to be on average approximately ±0.3°. When measuring the misorientation between two separate grains, the margin of error is double this value or ±0.6°. Higher angular resolutions would be possible with higher diffraction pattern resolutions but this would increase the time required to generate the TKD maps. An accurate estimate of the true angular resolution using
APT is difficult due to the time each individual measurement takes, the influence of so many variables, including the reconstruction calibration, and the protocols used to make the measurement itself and falls outside the scope of this manuscript. However, to gain some insight into the effect of reconstruction calibration and pole selection, three separate measurements were taken changing these parameters on each sample. It was presumed that the carefully calibrated recon- structions would result in significantly more accurate mis- orientation measurements, but based on the measurements in Tables 1 and 2, this could not be substantiated and is perhaps an indication of the robustness in making misorientation measurements from APT reconstructions. Nevertheless, some variance in the results, depending on parameter selec- tion, was observed. For the calibrated atom probe recon- structions, the maximumdeviation of misorientation angle is 2°. However, when the measurements using different pole selection are averaged, this falls to 1.4° and suggests that the accuracy can be improved by averaging multiple measure- ments using a different selection of poles. The deviation in the misorientation axis is larger, i.e., on average ~4°. This was to be expected as the nature of the misorientation axis calcula- tion is even more sensitive to variation in the orientation of each grain. The same compounding error is also seen in calculations from EBSD and TKD data. It is also worth pointing out that this is particularly the case when low angle
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