EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION CALIBRATION STANDARDS & SPECIMENS


 Magnification Reference Standards – SPM, AFM, SEM Calibration Standards (continued)  1. 301CE and MXS 701CE


The calibrated dimension is the spatial period of a series of parallel ribs running across the sample. The significant height of the ribs (>100nm) provides excellent image contrast. The top surface of the rib structures is somewhat rounded rather than completely flat. The edges of the ribs are readily discernible, with over 75% of the 3mm by 4mm sample area exhibiting an edge location variation, which is less.


Use and Imaging


The exceptionally clean and uniform pattern provided in an MXS 301CE and MXS 701CE standard displays few imperfections, which can be used as focusing and stigmation aids. For this reason, taking care in setting up the image before measurement is important. To assist in the set up process, an instruction sheet is provided with each standard. This sheet provides several example images, which can be used to determine if the image of the sample is correctly set up. Especially with the MXS 301CE and MXS 701CE line-space pattern standards, obtaining the proper stigmation is crucial since improper stigmation is not readily apparent when imaging a pattern of straight line. Once a proper focus and stigmation are obtained, the image can be shifted to an appropriate area and the desired measurements made.


 2. MXS 302CE and MXS 702C


The calibrated dimension is the spatial period of a series of a 2-dimensional grid spread across the surface of the sample. This grid consists of a series of cylindrical posts rising from the surface of the sample. The significant height of the ribs (>100nm) provides excellent image contrast. The top surface of these posts is somewhat rounded rather than flat and there are also slight departures from a perfect circle in the shape of some posts. Measurement techniques must be used which take these characteristics into account. The center-to-center distance of any pair is the most accurate measurements.


Use and Imaging


The exceptionally clean and uniform pattern provided in an MXS "CE" series 2-dimensional calibration standard displays few large scales imperfections. For this reason, taking care in setting up the image before measurement is important. To assist in this process, an instruction sheet is provided with the standard. This sheet provides several example images, which can be used to determine if the image of the sample is correctly set up. The characteristics of the MXS 302CE and MXS 702CE standards make them easier to image than the 1-dimensional standards. The 2- dimensional grid facilitates setting the stigmation of the image properly. Once proper focus and stigmation are obtained, the image can be shifted to an appropriate area and the desired measurements made. Since the pattern covers the entire sample area, it is possible to make over 1,000,000 measurements utilizing the standard without using the same area twice.


Specifications Product Data


Substrate


Top Surface Physical Size Accuracy


Nominal Dimensions


301CE & 701CE Silicon Wafer


60 nm Tungsten Film


302CE & 702CE Silicon Wafer


3mm x 4mm x 0.5mm 3mm x 4mm x 0.5mm 3mm x 4mm x 0.5mm ± 3% (x)


60 nm Tungsten Film ± 3%


(x, y)


300nm for MXS-301CE 300nm for MXS-302CE 700nm for MXS-701CE 700nm for MXS-702CE


Availability or mounted* un-mounted or mounted* un-mounted or mounted*


± 1% (x)


300nm un-mounted


*There is a cost for Mounted samples, using standard aluminum pin type stubs (EMS #75200). Please call us for all mount types.


** MXS 301BE Calibration sheet provided with standard contains actual dimensions to 3 significant figures. NPL traceability is also available with at an additional cost.


Each traceable standard is individually measured in comparison with a similar specimen calibrated at PTB. Ordering Information


Application Product Pattern Nominal Material Pitch


SEM SEM SEM


AFM, SEM, TOF-SIMS, Auger, etc.


701CE 301CE 702CE 301BE


Parallel 700 nm W-Coated Ridges


Parallel 300 nm W-Coated Ridges


Array of 700 nm W-Coated Posts


Special Services (Needs to be added to the standard price) SS-301 SS-SEM


301BE Certification Mount Certified Specimen for SEM Mounting Catalog #


Parallel 300 nm Ti Lines on Si Ridges


Photoresist on Si mounted Photoresist on Si mounted Photoresist on Si mounted mounted


each each


97


unmounted unmounted unmounted unmounted


80110-71


80110-71M 80110-31


80110-31M 80110-72


80110-72M 80111-31 80111-31M


301BE**


Silicon Wafer Ti pattern on Si


Cleaning for "CE" Series Cleaning is possible using dry air or other clean gases, high purity distilled or deionized water, and soft brushes. Rubbing with soft tissues, or any other firm physical contact, or the use of solvents, such as acetone or alcohol will damage the surface of the reference standard.


 3. MXS 301BE


The calibrated dimension is the spatial period of alternating lines of Titanium and Silicon. The use of two different elements provides excellent image contrast, and the titanium layer thickness is kept to 20 nm to control edge distortion effects in the SEM image. These physical characteristics make the edges sharp and readily discernable. The calibrated pattern covers the entire sample, providing over 1,000,000 measurement sites. Because the pattern is a direct recording of a laser-generated interference pattern which has been transferred into the 20 nm thick Titanium film, these calibration samples are the most accurate available.


Imaging and Applications The exceptionally clean and uniform pattern provided in a EMS MXS "BE" series calibration standard displays few imperfections, For this reason, taking care in setting up the image before measurement is important. To assist in this process, an instruction


sheet is provided with each standard. This sheet provides several example images, which can be used to determine if the image of the sample is correct. Once a proper focus and stigmation are obtained, the image can be shifted to an appropriate area and the desired measurements made.


The full screen image provided by a EMS calibration sample provides a unique advantage. Most calibration standards really verify accuracy of one portion of the image, while the entire screen is part of the measurement tool. With an image that fills the screen, you can quickly diagnose all types of image distortions, including problems due to vibrations, external fields, etc. A common problem is distortion caused by miss-adjusted CRT’s or scanners in which the magnification in one part of the image is different from another part of the image. Such problem are easily found and corrected using these calibration samples.


Cleaning for "BE" Series Titanium on Silicon produces a very durable calibration pattern. The calibration standard can be cleaned using common solvents such as acetone or alcohol, detergents, deionized water, etc. Gentle physical rubbing with soft tissues, brushes, etc., should not damage the sample. In extreme cases, cleaning by oxygen plasma is possible.


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