EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
PP3010T Cryo-SEM/Cryo-FIB/SEM Preparation System (continued) Compatibility with SEM Stage Bias Mode
The PP3010T cold stage is fully compatible with SEM stage bias/beam deceleration modes of up to 5kV.
CHE3010 Off-Column Cooling
The CHE3010 is a fully integrated, remotely mounted cooling system which comes as standard with every PP3010T. The CHE3010 is used to cool the SEM stage, SEM cold trap and cryo preparation chamber cold stage and cold traps and will typically reach temperatures down to - 190°C or lower.
The CHE3010 is remotely positioned (typically on the floor behind the microscope) and at normal operating temperatures can run for up to 24 hours between fills. This greatly simplifies the cryo process (no more checking on dewar status and topping off), but also allows overnight, unattended operation – particularly useful for some automated FIB/SEM "slice and view" protocols.
Single Port Interface to the SEM or FIB/SEM
Where SEM geometry allows, both the cryo preparation chamber and the SEM cooling system can be fitted to a single chamber port (the minimum port diameter is 38 mm). This gives a tidy installation and frees up a valuable chamber port.
SPECIFICATIONS Standard?
Cryo Preparation Chamber (column-mounted) Gas cooled preparation chamber with a twenty-four hour run time between fills Yes
Two integral gate valves (loading and SEM) with appropriate electrical interlocks Yes Variable temperature gas-cooled specimen stage Large cold shield above, below, behind the cold stage Robust micrometer-fed fracturing knife (actively cooled)
Yes Yes
Option
Side-mounted surface knife/probe (actively cooled). A range of scalpel blades can be fitted to suit different specimen requirements
Automatic sublimation (controlled and viewed on the touch screen)
Yes Yes
Fully automatic, high resolution sputter coater with platinum (Pt) target. (Other targets, including gold (Au), gold/palladium (Au/Pd), chromium (Cr) and iridium (Ir), are available as options.) Sputtering controlled and viewed on the user touch screen
Yes Carbon fiber evaporation head and power supply
Large front viewing window (150 x 78mm) plus top viewing ports Preparation chamber camera (CCD) Vacuum transfer device
Chamber illumination — three LEDs
Pumping System and Controls Remotely-mounted turbomolecular pumping system (70L/s). Includes: vacuum buffer tank, vacuum valves and stainless-steel bellows connection to the preparation chamber. Typical preparation chamber vacuum when cold: 10-7
mbar Single 50L/m rotary pump required
SEM Cooling Dewar, SEM Cold Stage and Cold Trap (anticontaminator)
Gas-cooled nitrogen cold stage assembly (-190°C). Temperature stability of >0.5°C Yes Separate gas-cooling circuits for SEM stage and SEM anti-contaminator
Yes
21L capacity, off-column cooling dewar with run time between fills of up to 24 hours
SEM CCD camera-fitted when space allows LED lighting (interlocked)
Yes Yes Yes
Option Yes Yes Yes Yes
OPTIONS AND ACCESSORIES
Specimen shuttles and stubs The PP3010T is supplied with a selection of holders, and a range of additional specimen shuttles and stubs is also available. (See Ordering Information for details).
Carbon Evaporation and Film Thickness Monitor
A carbon evaporation attachment and a terminating film thickness monitor can be fitted. Both are fully integrated (no external control boxes required).
Pressurized LN2 Dewar The PP7450/60L is a highly recommended option that generates dry nitrogen gas used for cooling the SEM cold stage & cold trap and cryo preparation chamber and cold shields. In addition, LN2 can be decanted for
Specimen shuttle
Gas cooling dewar and turbo pump Standard?
System Control and Specimen Handling Control via a color user touch screen monitor (15") mounted on the Prepdek™
• Multi-ability user interface screen • Quick, easy overview of system status • User-definable “recipes” can be stored • Quick access to videos outlining preparation techniques and system maintenance • Fully automatic sputtering • Automatic sublimation • Quick, easy overview of system status • CCD camera image of preparation chamber
Twin liquid nitrogen slushing and specimen handling system — ideal for handling pre-frozen specimens. Mounted on the Prepdek™
System electronics stored in a ventilated, sealed unit under the Prepdek™
Yes Yes
Specimen Shuttles and Stubs (Others available — see Ordering Information) • (2) AL200077B specimen shuttles (to hold 10mm diameter cryo stubs) • E7402 blank 10mm stubs — pack of 10
• E7449-5 multi-stubs 7mm high (with holes and slots) — pack of 5 • 11541 multi-stubs 5mm high (with holes and slots) — pack of 5 • 20529 Dovetail holder shuttle
• 328116510 Brass rivets for fracturing liquids — pack of 100 • E7406 Copper (Cu) stub with 3mm x 3mm slot — pack of 5 • E7407 Copper (Cu) stub with 1mm x 3mm slot — pack of 5
Yes Order separately
Installation and Training Installation and training at the customer site
Support and Other Information Comprehensive start-up kit with key spares
Three-year warranty Yes Contact EMS
Yes Yes
SEM column interfaces and SEM stage adaptor (tailored to each microscope) Yes
Some Options and Accessories (see Ordering Information for full list) Terminating film thickness monitor (FTM)
Self-pressurizing LN2 dewar and regulator (for storage and venting) Carbon fiber evaporation head
Wide range of specimen holders and specimen stubs
Option Option Option Option
Yes
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