EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION SEM SUPPLIES MeX 6.1 is now available
Featuring redesigned measurement modules for higher usability.
MeX 6.1 supports Windows 8 and comes in both 32bit and 64bit versions. MeX 6.1 is the recent software upgrade with new features for extended measurements. The latest technologies for applications in micro-coordinate measurement make any SEM into a comprehensive metrology tool that opens up new fields of use: Undercuts and larger field of views now measurable New features such as form fitting functionalities available Redesigned measurement modules provide higher usability
MeX — 3D Surface Metrology for SEM
MeX turns any SEM into a measurement device
MeX is a stand alone software package that turns any scanning electron microscope (SEM) with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination. The results are obtained irrespective of the SEM magnification providing metrology at macro and micro levels...
The software is self installing and is extremely easy to use. The modular design of the package allows flexibility in use; it also permits users, with a single repetitive task to perform, to purchase modules according to requirements. The analysis modules allow measurement of profile, roughness, area, volume and height. All measurements are traceable, can be calibrated and conform to ISO standards.
The performance of MeX has been proved by many customers in leading companies and universities throughout the world providing imaging and analysis previously unobtainable with SEM images.
Mex Features
MeX 6.1 automatically retrieves 3D information using stereoscopic images
MeX 6.1 measures distances, angles, circles, thread pitch etc.
Robust and highly accurate at any magnification The core of MeX is formed by its innovative 3D reconstruction algorithms. The research and development team of Alicona Imaging have invented methods that generate highly accurate, dense and robust results. This unique performance becomes obvious in images of complex structures with steep edges and drop offs in addition to demanding samples with low texture and signal-to-noise-ratio. This high quality is achieved irrespective of image magnification.
MeX 6.1 compares two different geometries.
MeX 6.1 automatically merges single measurements into a complete 3D data set.
Automatic measurement yields automatic calibration Conventional approaches rely on the use of two images. This comes with the major drawback that the overall accuracy of the 3D measurement is partly dependent on the accurate reading of the tilt angle. It is also commonly known that this reading maybe error-prone and can only be achieved to a certain level of accuracy. Latest developments of Alicona have extended this stereoscopic approach to a third image. As a result the user defined parameters, such as the tilt angle, are automatically calculated. This omits the influence of the user and allows, for the first time, traceable 3D measurement in the SEM.
Easy to use, easy to install
MeX 6.1 also includes form fitting functions.
No additional hardware is necessary to run MeX. As a pure software solution MeX can be operated with any SEM requiring only images in common formats. The software is self-installing and works completely independently of any third party drivers or components. The user interface of the overall package is very user friendly and self-explanatory. Data is obtained quickly and effectively. A wizard guides the user through the reconstruction process which then automatically converts the information to a 3D data set. The consecutive analysis is again intuitive and the user is not confronted with unnecessary functionality. The user finds exactly what is expected from a 3D metrology package.
Comprehensive depth analysis
The uniqueness of MeX is in its accuracy and robustness. But in order to perform appropriate measurements, beyond conventional visualization, analysis following international standards must be available. In MeX, the easy to use, roughness and area analysis are provided to EN/ISO standards. Measurements are performed directly on the SEM image. Printing and exporting the actual representations of an image are a one-click operation.
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