EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES Power, tuning and vacuum monitoring


RF power of up to 100W at 13.56MHz is available and can be infinitely controlled and pre-set to required values. Automatic tuning of forward and reflected power is standard. Forward power and vacuum levels are indicated by the digital display.


Automated microprocessor control


The EMS 1050 is fully automatic. Control parameters for time, power and vacuum are easy to preset and can be monitored and adjusted throughout the process run.


‘Autotuning’ of RF power for optimum control and reproducibility


During the plasma process the ‘autotune’ facility ensures that the RF power is automatically impedance-matched to any variation in the system or loading. This means conditions in the chamber are maintained at their optimum - important as it gives faster reaction times, greater reproducibility of results and protects the power supply during the RF cycle.


Pumping options


A working system requires only the addition of a specified rotary pump. A fomblinised rotary pump (91005-F) is strongly recommended for safety reasons when applications involve the use of oxygen as a process gas. Where oil-based rotary pumps need to be avoided, we offer dry pumping options (see Specifications).


These two SEM micrographs show before and after results comparing identical areas of a metal photo litho plate on which extraneous lines can be visualised. Treatment in a barrel plasma reactor, with oxygen as the process gas, removed the ink - which is essentially a carbon pigment in a binder - without disturbing anything that was present underneath. Subsequent SEM examination shows a scattering of particulate material made up of irregular


EMS 1050 during operation SPECIFICATIONS


Instrument Case ..............................................450mm(W) x 350mm(D) x 300mm(H) Barrel Work Chamber ......................................‘Pyrex’ 160mm(L) x 110mm(Dia.) (Borosilicate Glass as standard)


Weight ..............................................................25Kg Plasma Output ..................................................Solid State Power Supply: 0-150 watts continuously variable at 13.56 MHz with Tuning Control of forward and reflected power to optimize RF power transfer mbar Full scale normal


Vacuum Gauge..................................................ATM to 1 x 10-5 0.5 mbar to 1.0 mbar


Digital Timer Unit..............................................Displays elapsed time with range select: 0-99 min. 99 sec. 0-99 hours. Automatic termination of Ashing Process


Dual Gas Flow Gauge ......................................Dual Needle Valve flow control selectable for 1,2 or both gases


Supply ..............................................................115V 60Hz (6 Amp Max) 230V 50Hz (3 Amp Max) Services ............................................................Process Gas at nominal 5 psi (0.33 bar)


CAUTION: For Oxygen or Corrosive Process Gases Vacuum Pump should use a Synthetic Oil ‘Fomblin Oil’, or similar. ORDERING INFORMATION 91005-F 6564


93000 6563


EMS 1050 Plasma Asher


Rotary Vacuum Pump (Fomblin) Capacitance Manometer Quartz Chamber and Door


This SEM micrograph shows a set of free- standing single crystal silicon wires for studying thermal transport. The wires were fabricated in silicon-on-insulator material using electron beam lithography and CF4 plasma etching in a barrel reactor. The wires are 40µm long, 1µm wide and 0.5


each each each each


µm thick and are suspended above a silicon substrate. (Image courtesy of the Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge).


EMS 1050 during operation - close up


platelets 0.2 to 2µm in diameter. X-ray microanalysis gave a spectrum characteristic of a clay mineral.


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