EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION SEM SUPPLIES
MeX — 3D Surface Metrology for SEM (continued) Sample Image Requirements
Mex is a very easy to use package for the creation of 3D images for subsequent measurement with the SEM. The software will do nothing to correct faulty images nor will it allow you to see features that are not on the sample. But by following a few simple procedures the results will be both spectacular and contain significant data, these simple procedures are shown below.
1) All images must be in TIFF or BMP format
2) The magnification chosen must reflect the size of the features to be viewed; the software will not allow features to be measured that are not visible.
3) Tilt Angle: Mex will take either 2 or 3 images and these are divided by tilt angle, the choice of 2 or 3 images is specimen dependent. In the first case please supply a pair of images which have a differ- ential tilt angle of 5 degrees.
4) Eucentric Tilt: Please ensure that the images are eucentric, this means that a single chosen spot on the image should be in the same position on each image (see note)
5) Tilt Direction: Please ensure that the tilt direction, when viewed on the SEM screen runs East to West and not North South or diagonal. If images run at an angle this will result in image rotation which will reduce the size of the image that can be viewed.
6) Working Distance. To construct the image we need to know the working distance
7) Calibration: Please ensure that a scale bar is on the image. Note:
To take images for MeX it is necessary to have Eucentric Images, it is not necessary to have a Eucentric Stage to take Eucentric Images. What is also important is that when tilt is applied the image moves east to west (or west to east) and not north to south or any diagonal from that.
A simple method without a Eucentric Stage is 1) Find and identify a feature on the image that can be used as a reference
2) Either turn on the cross wires built into the SEM or stick a corner of a post it note on the feature
3) Decide which magnification the image is to be taken at, then go 2 magnification steps above that and align the feature
4) Drop the magnification down and take the image
5) Reduce magnification to a level where the bulk of the feature is still visible (this makes it easier to track when tilt is applied)
5) Apply tilt bringing the feature back into the frame with X or and Y
6) Either turn on the cross wires built into the SEM or stick a corner of a post it note on the feature
7) Then go 2 magnification steps above the magnification selected in #3 and align the same feature
8) Drop the magnification down and take the second image If a third image is required simply repeat the process
Ordering Information Cat#
Product Name
Packages MP-0101
MeX-Standard MeX-Professional Qty. Package
MeX-Database, MeX-3DViewer, MeX-Creator, MeX-AutoCalibration, MeX-Profile, MeX-Area, MeX-Volume, MeX-SCS for one year MP-0102
Package
All available MeX modules: MeX-Database, MeX-3DViewer, MeX-Creator, MeX- AutoCalibration, MeX-Profile MeX-Area, MeX-Volume, MeX-StereoComparator, MeX-3DReader inclusive two years of e-mail support and free updates
Modules MM-0109
MeX-3DReader
Importing 3D datasets obtained from other devices such as AFM (ask for supported machines and formats) MM-0104
Visualizing generated 3D-data in an intuitive, easy-to-use viewer MM-0106
MeX-3DViewer MeX-Area
Area analysis including roughness measurements MM-0103
MeX-AutoCalibration MeX-Creator each
each each each
Extension to MeX-Creator - using three images, calibration data are refined and a much higher accuracy is achieved MM-0102
Graphical database for storing and maintaining the captured stereoscopic images MM-0105
MeX-Database MeX-Profile
each each
Profile extraction, visualization and analysis including EN/ISO roughness and waviness measurements MM-0108
Manual pointwise 3D measurement for stereoscopic images MM-0107
MeX-StereoComparator MeX-Volume
Volume extraction, visualization and analysis
Options MA-0101
MeX-FloatingLicence
Service & Support MS-0104
each
Dongle to allow network version of MeX: provides the use of MeX in a local network with only one dongle
MeX-Installation
Shipping, installation and training for one day at your location (excl. travel expenses and accommodation). MS-0103
MeX-OfflineReconstruction
Measurement of your specimen in our lab, including a CD with results and demo version MS-0102
MeX-OnlineReconstruction
Measurement of your stereoscopic images; the result can be viewed and analyzed by MeX-Demo MS-0101
MeX-SCS ServiceContractSoftware
One year of e-mail support and free updates; continuous MeX- ServiceContractSoftware required for upgrades/updates MS-200
MeX 6.1 Professional Upgrade
An upgrade to MeX Professional Module (for service contracts that have expired within 1 year). MS-250
MeX 6.1 Professional Upgrade
An upgrade to MeX Professional Module (for service contracts that have expired over 1 year). MS-0106
MeX-Installation&TrainingContinued
Installation and adoption training for one additional day at your location. Travel- and accommodation costs are excluded.
Tools IA-0110
78 IF-VerificationTool PTB-certified micro contour standard for verification of InfiniteFocus each each each each each each each each
each each
each
Automatic surface measurement from stereoscopic images — the core module of MeX (requires MeX-Database and MeX-3DViewer) MM-0101
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