EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION SEM SUPPLIES
MeX — 3D Surface Metrology for SEM (continued) Height & Roughness Analysis
Profile measurement enables virtual cutting of specimen. The user defines a path on the optical image and receives the corresponding 3D profile. Roughness and contour measurements conform to recognized EN ISO 4287/4288 international standards. The profile analysis also allows the fitting of primitives such as circles, angles or others. Further, manual and semi automatic measurement possibilities are provided.
Profile extraction with different width
Filtering of the profile with selectable Lc value with ISO 4288 conformity information
Manual cursor measurement
Automatic measurements of lines, parallel lines, single height steps, double height steps, ISO 5436 conform height steps, angles, 2 line angles and circles
ISO 4287 conform calculation of the following primary parameters: Pa, Pq, Pz, Pp, Pv, Pc, PSm, Psk, Pku, Pdk
ISO 4287 and ISO 11562 conform calculation of the following roughness parameters: Ra, Rq, Rz, Rp, Rv, Rc, RSm, Rsk, Rku, Rdk
ISO 4287 conform calculation of the following waviness parameters:Wa, Wq, Wz, Wp, Wv, Wc, WSm, Wsk, Wku, Wdk
Calculation of fourier spectrum of profiles Calculation of bearing ratio curve
Calculation of statistical parameters of profiles
Area Analysis
Area analysis provides the determination of Ra, Rq and Rz. Parameters like roughness, waviness and the fractal dimension of user defined surface patches are achieved. The user defines a region of interest such as a rectangle or polygon and MeX automatically calculates the values. For the visual representation of the surface a grey scale or pseudo colored depth map can be used. It is also possible to display ISO-lines to highlight depth variations.
Calculation of surface parameters like Sa, Sq, Sz, Sp, Sv Calculation of fractal dimension Extraction of horizontal and vertical profiles Filtering of profiles
Calculation of mean of the primary, roughness and waviness values of the horizontal and vertical profile
Calculation of the primary, roughness and waviness parameter
of the mean horizontal and vertical profile
Calculation of bearing ratio curve Calculation of bearing area curve
Volume Analysis
Volume analysis calculates the volume of voids and protrusions. The measurement area is defined directly on the optical image. The volume is determined throughout the computation of a soap film model. For the 3D boundary of the selected area MeX calculates a covering surface that behaves like a soap film.
Selectable area for volume measurement
Selectable reference surface (plane, minimum spanning surface, top and bottom cover)
Automatic calculation of reference plane from 3D points
2D Image Analysis
2D image analysis allows the performance of manual and semi automatic measurement of simple primitives. Also, the ability to write on the images as well as saving measurement results in a comprehensive and easy to use database is provided.
Manual measurement of lines, parallel lines, arcs, circles, ellipses, polygons, polylines, freehand, marker
Automatic measurement of lines, parallel lines, circles, arcs
Statistical calculation of results such as mean, standard deviation, minimum, maximum, median
Automatic search of equally shaped structures on the image
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