EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS 975 (Continued) Specimen stages
The EMS 975 is fitted with an 80mm flat stage as standard, but this may be exchanged for optional holders, such as a 3mm grid holder, low- angle shadowing attachment and a rotary planetary stage (see Options and Accessories). Specimen holders are supplied with a bayonet fixing for quick exchange.
SPECIFICATIONS
Dimensions and Weight 450mm (W) x 500mm (D) x 300mm (H). 65kg Work Chamber
Implosion Guard Carbon source
EMS 975 specimen stage and optional film thickness monitor (FTM)
EMS 975 specimen drawer with stage in specimen exchange position
The rotary stage is mounted on a sliding access port on the side of the chamber. This allows the user to exchange specimens quickly without having to remove the glass chamber and disturb any coating set-up. The standard flat stage may be tilted. For rotary shadowing techniques, the standard stage can be tilted from 0° to +/- 180°.
Chamber base plate and evaporation power supplies
The EMS 975 is fitted with a 0-100A evaporation power supply with base plate terminals for carbon rod evaporation (14V/100A), evaporation from a metal filament (15V/35A), carbon string evaporation (25V/35A) and a terminal rated at 5V/35A for TEM and SEM aperture cleaning using a molybdenum (Mo) boat. A wide range of add-on options is available - see Options and Accessories.
Metal source Specimen Stage Low voltage
evaporation supply Services
Vacuum pumping Electrical supply
Polycarbonate - readily removable for maintenance
Adjustable height with tilt control of 0-200°. Uses 6.15mm Ø carbon rods (source for 3.05mm Ø carbon rods can be fitted - please specify at time of ordering)
Adjustable height with tilt control 0-200°. Supplied with pack of 10 B5230 tungsten specimen baskets With tilt facility 0-45°
Vacuum Gauge range Atm to 1 x 10-7-7 Operating Vacuum
Towards 1 x10-5 mbar mbar,
typically achieved within 15 minutes Pulsed or variable control.
Selectable: 0-5V-15V-25V, out-gas current: 0-25A
Nitrogen gas (if used for venting). Argon gas (if the optional sputtering attachment is fitted)
100L/s turbomolecular pump. Requires a 50L/m 'backing' rotary pump with oil mist filter
230V/50Hz (8A max including pump), 115V/60Hz (16A max including pump)
Supplied with Accessory kit including: carbon rods (6.15mm x 100mm), evaporation filaments, manual rod shaper and operating manual
ORDERING INFORMATION 91090-C
91090-S 91005
Close up of EMS 975 carbon evaporation source. The ‘anti-stick’ design ensures smooth movement of carbon rods during evaporation
EMS 975S Thermal Evaporator
The EMS 975S is based on the EMS 975, but a special load lock door allows the loading of wafers up to 8"/200mm. Please contact us for more information.
EMS 975 metal evaporation source fitted. NB: Can also be use to evaporate carbon fiber string
EMS 975 Large Chamber Turbo
Evaporator complete with carbon source EMS 975S Turbo Evaporator for Semiconductor Wafer Coating Rotary Vacuum Pump
Replacement Source 91077
Replacement Parts 91033 91034
Carbon Rods (6.15mm Dia.)
Glass Cylinder “L’’ Gaskets
Optional Accessories 91004-S 92060
EMS 105 Aperture Cleaning Head EMS 190 Low Angle Shadowing
each each each
each
each each
each each
Borosilicate Glass 250mm (Dia.) x 300mm (H) with hinged top plate (can accommodate samples to 200mm) (8") in Dia.
6.15mm diameter rods (left)
Carbon rod shaper supplied with the EMS 975 (above)
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