EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES  PP3010T Cryo-SEM/Cryo-FIB/SEM Preparation System (continued)


Both the cold stage and cold traps are cooled with the fully integrated CHE3010 off-column cooling system (see below), which at normal operating temperatures give typical hold times of at up to 24 hours between fills (provided the nitrogen gas is dry).


High Visibility – Plus CCD Camera


There is superb visibility into the preparation chamber. In addition to the large front window (75 x 150 mm), there are two top viewing ports. The chamber is lit by three LEDS and a CCD camera allows the specimen cold stage area to be viewed on the control screen and the images saved.


An optional stereo microscope can also be fitted to the cryo preparation chamber


Cold Fracturing


Twin fracturing tools manipulators (actively cooled) are available and allow a range of specimen types to be cold fractured.


The PP3010T is fitted as standard with a front mounted fracturing and manipu- lation device. The ball-jointed mount offers flexible movement of the blade which can be used both as a surface pick (probe) and a fracturing knife.


required. The pumping system is connected to the preparation chamber by flexible stainless-steel bellows, which allows flexible positioning of the pumping system.


A 5 m3


/hr rotary vacuum pump is required to "back" the turbomolecular pump and for slushing and rough pumping operations. The rotary pump can be located up to five meters from the system, allowing remote location if required. Dry pumping alternatives are available – see Ordering Information.


Prepdek™ Workstation The Prepdek™ workstation has been


designed to allow specimen mounting, freezing (plus pre-frozen specimen manipulation) and transfer device storage on one ergonomically designed work surface. The control electronics are mounted in a sealed but accessible cabinet beneath the Prepdek™


.


Front-mounted fracturing and specimen manipulation tool


An optional micrometer-advanced fracturing tool with rigid blade is available, in addition to the standard front-mounted tool.


Fractured fragments are captured in the large cold trap located below the specimen stage.


Automatic Sublimation and Sputtering


Sublimation temperatures and times can be preset and stored for easy retrieval. The process is fully automatic and graphically displayed on the control screen, showing the actual verses the predicted temperature curves.


The high resolution sputter coater is based on the market leading series of bench top coaters. The coating system will give fine grain films essential for FE-SEM applications. A platinium target is fitted as standard – optional metals include gold, gold/palladium, chromium and iridium. An optional fully integrated carbon fiber evaporation head can also be fitted.


An optional terminating film thickness monitor is available.


Turbomolecular Pumping – High Vacuum Performance The preparation chamber is pumped by a remotely-positioned 70 L/s turbomolecular pumping system. Typical preparation chamber vacuums when cold are in the region of 10-7


Set into the work surface is a pumped storage tube which allows the cryo transfer device to be stored under vacuum conditions when not in use.


Panel PC Touch Screen User Interface


The PP3010T is controlled using a large touch screen panel PC, mounted on the Prepdek™


workstation.


User-defined 'recipes' can be entered and stored for instant future access. The screen can be set to suit operator preferences; for example, vacuum measurement can be displayed in millibar, Pascal or Torr.


SEM Cold Stage, Cold Trap and Cooling System


mbar


or better. Positioning the turbomolecular pump away from the SEM ensures total elimination of mechanical vibration and has the advantage of significantly reducing the total cryo system mass connected to the SEM. A vacuum buffer tank (remotely located in the Prepdek™


A highly stable, thermally isolated, nitrogen gas-cooled stage attaches to the SEM stage. The SEM stage and cold trap are cooled by separate cold gas circuits – both capable of reaching temperatures of -190°C or lower. This configuration allows the operator to select stage and cold trap temperatures that are optimized for specific specimens. For example, for some non- biological materials, it is useful to hold the specimen at very low temperatures


Remotely mounted turbomolecular pumping system


) is automatically pumped when


When not in use, the cryo transfer device can be stored under vacuum in the pumped storage tube, located on the Prepdek™


work surface


Typical screen view during operation (with camera image minimised)


Many of the key steps in the specimen preparation process are automated (system set up, gas flow control, sublimation and sputter coating).


Gas-cooled SEM cold trap (temperatures down to -190°C). Tailor-made to suit each SEM


– for example, a cold stage temperature of -175°C. This is possible with the PP3010T, as cold trap temperatures of -190°C or lower can be selected, but not possible with conduction cooled systems. The SEM cold stage has a temperature range of down to -190°C and a temperature stability of < 0.5°C.


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