EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION SEM SUPPLIES MeX — 3D Surface Metrology for SEM (continued)
The visual link between the surface and the image enable precise and flexible measurements. Even volumetric analysis is conveniently feasible. Therefore MeX is the only software package that turns a SEM into a true 3D metrology device.
How does Mex work?
The image formation process in the SEM is based on perspective projection. Similar to a conventional light microscope the three dimensional object is projected onto a two dimensional image plane and information about the third dimension is lost. Note, the large depth of focus in SEM provides full depth of focus images, but does not allow to measure depth. Only two dimensional measurements in the image plane are feasible.
An eucentric tilting of the stage, meaning that the intersection of the primary electron beam with the specimen define the centre of tilting, yield a second image of the specimen observed form a different viewpoint. A so called stereoscopic image is generated. Overlay techniques such as red-green coloring provide anaglyph viewing and thus depth perception but again no quantitative analysis. The leading technology of Alicona now automatically identifies points in each of the images that belong to the same point on the specimen. From theses so called homologous points the true three dimensional coordinates of the observed point can be recovered. This demanding task is robustly solved for each pixel in each of the images and thus a dense 3D model of the specimen is obtained. An additional third image captured from a third tilt position allows to automatically refine given calibration data. Thus traceable results are obtained.
Automatic Calibration Verification of measurements through height step
Height measurements with the AutoCalibration can be verified using a micro-contour-artifact that is calibrated by the PTB (Physikalisch Technische Bundesanstalt, Braunschweig). The depth measurement standard from the PTB contains grooves of different depth (from 240nm to 50µm).
Micro- contour-artifact, calibrated by PTB
The unique AutoCalibration works fully automatically. Alicona is the only supplier able to offer this technology.
MeX is the only real metrology package that allows numerically accurate measurements independent on the magnification.
MeX allows extended analysis features such as ISO conform roughness analysis and extended form analysis.
Reconstructions And Analysis In The SEM
Input image, 3D reconstruction and height measurement with the AutoCalibrator. The AutoCalibrator refines the calibration data and allows more accurate measurements.
Measurement results in comparison Stereo
PTB Creator AutoCalib 24.04µm ±0.07µm 25.3µm 24.10µm
Angle refinement with AutoCalibration Stereo Creator -9,5°
AutoCalib
Measurements of the pure software solution MeX can be verified using a micro-contour-artifact that is calibrated by the PTB (Physikalisch Technische Bundesanstalt, Braunschweig). The artifact contains different regions including steep flanks, height steps and cylindrical elements.
The following measurements can be verified:
Circle measurements Steep flanks Depth measurements
Reconstructions And Analysis In The SEM
PTB calibrated micro artifact with steep flanks, height steps and cylindrical elements.
Verification of measurements through radius measurement 9,5° -10,05° 10,00°
Verification of circle measurements. One of the input images (SEM) obtained from the region with the cylindrical valleys. The radius of the circle was measured with MeX – AutoCalibration.
Measurement results in comparison Stereo
PTB Creator AutoCalib 80µm ± 2µm 75.11µm 81,14µm
Angle refinement with AutoCalibration Stereo Creator -10° 10°
AutoCalib -10,86° 11.01° 75
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