EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS 7620 (continued) Choosing a target
Gold/Palladium (Au/Pd): Supplied as standard. Has the same properties (sputtering rate, secondary electron yield, cost) as gold but the sputtered grain size is smaller.
Gold (Au): Gold sputter coating is still widely used in many laboratories
Platinum (Pt): The sputtered grain size is smaller than gold or gold/palladium. Platinum has a slower sputtering rate and is more expensive than gold or gold/palladium.
Silver (Ag): Compared to the other metals, it is relatively easy to remove silver. Therefore it is useful for museum and forensic specimens.
Palladium (Pd): Sometimes used instead of gold, gold/palladium and platinum for x-ray microanalysis. All targets are 57mm Ø x 0.1mm thick (unless specified otherwise)
Ordering Information Cat No.
Description EMS 7620 'Mini' Sputter Coater each
Supplied with: 91017-AP gold/palladium (Au/Pd) target, 1m length of 12mm bore flexible vacuum hose, 1 x KF25 hose adapter flange and fittings to fit a rotary pump, 1 x rotary pump plug, comprehensive operating instructions
91017-Au 91017-AP 91017-Pt 91017-Ag 91017-Pd
Gold (Au) target Palladium (Pd) target
Gold/palladium (Au/Pd) target each Platinum (Pt) target Silver (Ag) target
each each
each eacht
91017-.2-Au Gold target (Au) 0.2mm thick each 91017-.2-AP Gold/palladium (Au/Pd) target 0.2mm thick
each
EMS 7620-CF Carbon Accessory Power Supplies The 7620-CF carbon attachments are modular add-ons for our sputter coaters, allowing carbon fiber or carbon rod evaporation.
Each attachment uses the existing chamber and vacuum system of the sputter coater and is therefore a costeffective and efficient method for the evaporation of carbon for SEM applications. Note that the diameter of the top plate will vary according to the chamber size of the sputter coater onto which it is being fitted. We also offer free-standing carbon evaporators - see the EMS 150R1 and EMS 150T.
TThe EMS 7640-CF, EMS 7640-CR and EMS 7620-CF can be used in conjunction with the EMS 7620 (EMS 7620-CF), EMS 500X, EMS 550X, EMS 575X, EMS 650X and EMS 675X sputter coaters. Sometimes it is also possible to retrofit one of the above onto our older models, Please contact us for information on compatibility.
The attachment consists of two components - a free-standing power supply and a carbon fiber or carbon rod head to suit the chamber size of the sputter coater onto which it is to be fitted.
The power supply is switchable between 10V/100A (for carbon rod evaporation) and 20V/50A (for carbon fiber evaporation). A vacuum interlock is provided to ensure safe operation of the sputter coater and carbon accessory system. Out-gas and coat switches are provided for complete control of the evaporation sequence.
Ordering Information Sputter Coater
EMS 7620 Sputter Coater EMS 500X, EMS 550X, EMS 575X, EMS 675X
Carbon fiber cord 91046-1
91046-10 91046-100 91047-1 91047-5 91046
91046-4 91046-01 70210-10 70210-25
Attachment Not Available EMS 7640-CR
Carbon fiber cord - standard grade - 1m Carbon fiber cord - standard grade - 10m Carbon fiber cord - standard grade - 100m Carbon fiber cord - high purity - 1m Carbon fiber cord - high purity - 5m
Carbon fiber cord - standard purity, fine strands - 1m Carbon fiber cord - standard purity, fine strands - 10m Carbon fiber cord - standard purity, fine strands - 100m
Shaped ('stepped') carbon rods - high purity - 3.05mm Ø x 50mm pack of 10
Shaped ('stepped') carbon rods - high purity - 6.15mm Ø x 50mm pack of 10 NOTE: 3.05mm diameter carbon rods are used with the EMS 950X, EMS 450X and EMS 350. 6.15mm diameter carbon rods are used with the K975X and with most older Polaron-branded carbon evaporators.
171
Attachment EMS 7620-CF EMS 7640-CF
Features Carbon rod or fiber
Protection shutter Modular control electronics Interlocking for safe operation Three-year warranty
Specifications Dimensions
Weight
Carbon source Ammeter gauge
Low voltage Out-gas current Electrical supply
235mm W x 350mm D x 175mm H.
15kg
Carbon fiber, carbon cord
0-50A 25V
Selectable for carbon fiber or carbon rod
230V/50Hz (3A max), 115V/60Hz (6A max)
Cat No. Description 91017-.2-Pt Platinum (Pt) target 0.2mm thick
91003
96000 96001 91040
RV-3 two-stage rotary pump with oil mist filter (115/230V 50/60Hz)
Replacement compact oil mist filter
Replacement compact oil mist filter cartridge
Optional carbon fibre evaporation attachment and controller
each
Carbon evaporation attachment — EMS 7620
each each each each
Optional carbon fibre evaporation attachment and controller (fitted)
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