EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES


ORDERING INFORMATION  EMS 150R Plus (continued)


EMS 150R S Plus 4500


Specimen stages


EMS 150R S Plus Fully automatic, capacitive touch- screen controlled rotary-pumped sputter coater with status LED indicator. Including: quick-release sputter insert, one 57 mm diameter x 0.1 mm gold target, and 50 mm diameter rotating specimen stage.


EMS 150R E Plus 4503


EMS 150R E Plus Fully automatic, capacitive touch- screen controlled rotary pumped carbon fiber evaporation coater with status LED indicator. Including: quick-release carbon fiber insert for evaporation of carbon cord, carbon fiber cord, and 50 mm diameter rotating specimen stage.


EMS 150R ES Plus 4507


EMS 150R ES Plus Fully automatic, capacitive touch- screen controlled rotary pumped sputter coater and carbon evaporator with status LED indicator. Including: quick release sputter insert, one 57 mm diameter x 0.1 mm gold target, and carbon fiber evaporation coater, including quick-release carbon fiber insert for evaporation of carbon cord*, and 50 mm diameter rotating specimen stage.


*Coating inserts are interchangeable and can be swapped in seconds. The intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.


Options and Accessories


Head inserts and glow discharge 4511


4512 4513


4514 4515


4516 4517


Additional sputter insert for quick metal change (R E and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased


Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod


Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted Additional standard glass chamber assembly


Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens


Rotating vacuum spigot allows more convenient connectionof the vacuum hose to the rear of the EMS150R when bench depth is limited


Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited


4518 Spare quartz crystal each


All rotating stages have variable rotation of between 8 and 20 rpm. 4519


50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or " pin stubs. Stage rotation speed variable between 8 and 20rpm


4520 4521 4522


90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm


Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm


Flat rotation specimen stage for 100 mm/4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm


Carbon Supplies 4538 4539 4540 4541 4542 4543


4544 4546


Carbon fiber cord – high purity – 1m Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m


Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10


Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10)


Manual rod shaper for 3.05 mm Ø carbon rods


Sputtering Targets 4523 4524 4525 4526 4527 4528 4529 4530 4531 4532 4533 4534 4535 4536 4537


Spare Kits 4547


4548 4549


57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold 57 mm Ø x 0.3 mm Gold


57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.2 mm Platinum 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper


57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum/Palladium (80/20)


Two-year spares kit for EMS150R S Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings Two-year spares kit for EMS150R E


Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs Two-year spares kit for EMS150R ES


Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs


each each each each each each each each each each each each each each each


each each each each


179


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76  |  Page 77  |  Page 78  |  Page 79  |  Page 80  |  Page 81  |  Page 82  |  Page 83  |  Page 84  |  Page 85  |  Page 86  |  Page 87  |  Page 88  |  Page 89  |  Page 90  |  Page 91  |  Page 92  |  Page 93  |  Page 94  |  Page 95  |  Page 96  |  Page 97  |  Page 98  |  Page 99  |  Page 100  |  Page 101  |  Page 102  |  Page 103  |  Page 104  |  Page 105  |  Page 106  |  Page 107  |  Page 108  |  Page 109  |  Page 110  |  Page 111  |  Page 112  |  Page 113  |  Page 114  |  Page 115  |  Page 116  |  Page 117  |  Page 118  |  Page 119  |  Page 120  |  Page 121  |  Page 122  |  Page 123  |  Page 124  |  Page 125  |  Page 126  |  Page 127  |  Page 128  |  Page 129  |  Page 130  |  Page 131  |  Page 132  |  Page 133  |  Page 134  |  Page 135  |  Page 136  |  Page 137  |  Page 138  |  Page 139  |  Page 140  |  Page 141  |  Page 142  |  Page 143  |  Page 144  |  Page 145  |  Page 146  |  Page 147  |  Page 148  |  Page 149  |  Page 150  |  Page 151  |  Page 152  |  Page 153  |  Page 154  |  Page 155  |  Page 156  |  Page 157  |  Page 158  |  Page 159  |  Page 160  |  Page 161  |  Page 162  |  Page 163  |  Page 164  |  Page 165  |  Page 166  |  Page 167  |  Page 168  |  Page 169  |  Page 170  |  Page 171  |  Page 172  |  Page 173  |  Page 174  |  Page 175  |  Page 176  |  Page 177  |  Page 178  |  Page 179  |  Page 180  |  Page 181  |  Page 182  |  Page 183  |  Page 184  |  Page 185  |  Page 186  |  Page 187  |  Page 188  |  Page 189  |  Page 190  |  Page 191  |  Page 192  |  Page 193  |  Page 194  |  Page 195  |  Page 196  |  Page 197  |  Page 198  |  Page 199  |  Page 200  |  Page 201  |  Page 202  |  Page 203  |  Page 204  |  Page 205  |  Page 206  |  Page 207  |  Page 208  |  Page 209  |  Page 210  |  Page 211  |  Page 212  |  Page 213  |  Page 214  |  Page 215  |  Page 216  |  Page 217