EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS300T D Plus (continued)
Dual sputtering heads and automatic shutter
Rotary planetary stage and dual- channel film thickness monitor - both Q300T D Plus option
Rotate-tilt stage – 50 mm Ø. With height adjustment (target to stage height variable between 30-80 mm). The tilt angle can be pre-set (horizontal to 30°).
Rotation stage for glass slides – 25 mm x 76 mm Safety
The EMS 300T D Plus meets key industry CE standards • All electronic components are protected by covers • Implosion guard prevents user injury in event of chamber failure
• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened • Overheating protection shuts down power supply Vacuum control
High vacuum turbo pumping allows sputtering of a wide range of oxidizing and non-oxidizing metals for thin film and electron microscopy applications. Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.
Cool magnetron sputtering
Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for some applications because it can heat the substrate and result in damage when the plasma interacts with the substrate. The EMS 300T D Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your substrate is protected and uniformly coated.
The EMS 300T D Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. It is fitted with gold (Au) and chromium (Cr) sputter targets as standard.
Pulsed cleaning for Aluminum sputtering Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove. The EMS 300T D Plus has a special recipe for Aluminum that reduces the oxide removal time and prevents excessive pre-sputtering of the target.
Film thickness monitor
The EMS 300T D Plus can be fitted with an optional dual film thickness monitor (FTM), which measures the coating thickness on two quartz crystal monitors located within the chamber. The thickness measured on the monitor can be correlated to the thickness on the substrate using a mathematical formula built into the software; this allows the user to control the thickness of material deposited on to the substrate. For example, the EMS 300T D Plus can automatically terminate a coating profile when the required thickness has been achieved. Alternatively, the process can be terminated by time.
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Standard rotating specimen stage with 4 wafer and optional dual- channel film thickness monitor
SPECIFICATIONS Instrument Case
Weight
Packed Dimensions Work Chamber
Display User Interface Specimen Stage
A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm
Vacuum Rotary Pump
Turbo Pump
Vacuum Measurement Ultimate Vacuum
Sputter Vacuum Range Processes
Sputter Deposition Current 150 mA Visual Status Indicator
A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.
The indicator LED shows the following states: • Initialization • Process running • Idle • Coating in progress • Process completed • Process ended in fault condition Audio indication also sounds on completion of the process.
Services Gases
Vent Gas
process gas argon, 99.999% Nominal 5psi
Nitrogen (optional). Nominal 5psi
50L/min two stage rotary pump with oil mist filter
Internally mounted 70L/sec air cooled
Pirani gauge as standard, full range gauge available as an option 5 x 10-5 5x10-3
mbar* to 5x10-2 mbar*
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
Optional specimen stage for glass microscope slides and dual- channel film thickness monitor
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) 36 kg (packed: 59kg)
730 mm W x 630 mm D x 690 mm H
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
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