EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES


 EMS300T T Plus (continued) EMS 300T T Plus


ORDERING INFORMATION 6559


Triple Target, Large Chamber, Turbo-Pumped Sputter Coater, fitted with three sputtering heads to ensure even metal deposition. Includes three 57 mm Ø x 0.3 mm chromium (Cr) sputter targets. A flat rotation stage for 200 mm/8" and 150 mm/6" wafers is fitted as standard.


Rotary pump requirements (needs to be ordered separately) 91003


6548 6550-A


Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter XDS 5 Scroll Pump Diaphragm pump.


A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter


Specimen stages 6551


Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8" pin stubs. Stage rotation speed is variable between preset limits. No rotation when in single target mode. Target to stage height is variable between zero and 42 mm for the standard stage. When used with the extended height cylinder (optional accessory) the target to stage height would be an additional 87 mm


6552 6553


50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Stage rotation speed variable between preset limits


each each


each 6562 6560-A each 6561


Coating shields. Shields can be fitted to protect large surfaces from coating deposition – easily removable for ease of cleaning


Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS 300T T Plus when bench depth is limited


Full range, active vacuum gauge capable of measurement over the range of 1000 mbar to 5 x 10-9


mbar.


Typical ultimate vacuum of system is 5 x 10-5 mbar. Note: gauge must be factory fitted


Spares kit, including: spare standard glass cylinder, three 3417 chromium (Cr) sputtering targets, vacuum tubing with coupling insert, argon gas tubing, three sputter head magnets, rotary pump oil mist filter and fuses


Sputter targets each each


50 mm Ø rotary tilting stage. A rotary planetary style stage with variable tilt angle from horizontal to 30 degrees. The platform has six positions for either, 6.5 mm, 10 mm, 15 mm disc stubs, or 1/8" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder


6554


A 90 mm Ø specimen stage for glass microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six " SEM pins stub. Stage rotation speed is variable between preset limits. Includes gear box to allow optional FTM to be used.


6547 6549


6" Wafer Specimen Stage: A flat adjustable stage capable of accepting 6" or 101.6 mm wafers


A 4" 102 mm flat drop-in-wafer stage which accepts 2", 3", and 4" wafers


Options and Accessories 6555


6556 6557


6558


Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and one quartz crystal


Spare quartz crystal each


each each each


each each


Extended height vacuum chamber (214 mm in height – the standard chamber is 127 mm high). For increased source to specimen distance and for coating large specimens each


A lockable emergency stop (e-stop) switch which can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. Note: the addition of the e-stop does not inhibit or replace the normal On/Off switch function. The e-stop can be retrofitted to existing systems each


190


Note: The EMS 300T T Plus is fitted as standard with three 0.3 mm chromium (Cr) targets (3417). Other optional targets are available (three required): 3410 3411 3412 3413 3414 3415 3416 3417 3418 3419 3420 3421 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435 3436 3437


57mm Ø x 0.1mm Gold


57mm Ø x 0.1mm Gold/Palladium (80/20) 57mm Ø x 0.1mm Platinum 57mm Ø x 0.1mm Nickel 57mm Ø x 0.1mm Silver 57mm Ø x 0.1mm Palladium 57mm Ø x 0.1mm Copper 57mm Ø x 0.3mm Chromium 57mm Ø x 0.5mm Tungsten 57mm Ø x 1.5mm Chromium 57mm Ø x 0.2mm Tungsten 54mm Ø x 1.5mm Carbon 57mm Ø x 0.1mm Aluminium


57mm Ø x 0.1mm Platinum/Palladium (80/20) 57mm Ø x 1.5mm Titanium


57mm Ø x 0.3mm Platinum/Palladium (80/20) 57mm Ø x 0.3mm Gold


57mm Ø x 0.3mm Gold/Palladium (80/20) 57mm Ø x 0.3mm Platinum 57mm Ø x 0.5mm Titanium 57mm Ø x 0.1mm Ironeach 57mm Ø x 0.3mm Iridium 57mm Ø x 0.1mm Cobalt 57mm Ø x 0.1mm Tin


57mm Ø x 0.1mm Molybdenum 57mm Ø x 0.3mm Magnesium 57mm Ø x 0.1mm Tantalum


57mm Ø x 3mm Indium Tin Oxide (90/10)


each each each each each each each each each each each each each each each each each each each each each each each each each each each each


each each each


each


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