EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION CLEAVING & SCRIBING SYSTEMS AND TOOLS
FlipScribe™ Scribing Machine FlipScribe™ takes scribing to a new performance level, making clean, straight scribe lines on the back side to accurately cleave front side targets, bonded wafers and other substrates. This method eliminates contamination of sensitive front side devices during the scribing processes and is valuable for both crystalline and amorphous samples.
Scribing Reinvented
FlipScribe is a compact, stable, accurate, fast and low cost scribing and cleaving solution suitable for any lab; no utilities required. It provides a more accurate method for scribing than can be achieved with hand held tools, by integrating a robust diamond scribe into a sample platform with a fence guide design. Time required to align and scribe is about a minute. It allows users to accurately position the scribe mark relative to features on the front side, visualized either by eye or with a user-supplied high magnification microscope. FlipScribe also offers a quick method for cleanly downsizing large samples, with a "scribe stop" to allow the operator to define the length of the scribe.
BENEFITS
Enables accurate cleaving through frontside targets with a scribe made on the backside of the substrate
Scribe does not damage the frontside of the sample Accuracy of scribe ±200 µm (achievable) Flexible with respect to sample size and shape
Capable of scribing bonded crystalline and amorphous wafers and chips for subsequent cleaving
No maintenance required
FEATURES Accurate positioning of the scribe relative to features on the front side (the front side being observed either by eye or with a stereo- scope)
The length of the scribe can be varied from 1 mm to 100 mm
Prealigned diamond scribe in user replaceable cartridge; height and angle adjustable
Ruler embedded in platform enables precise and repeatable sam- ple alignment and sizing
The tool is purely mechanical; no power required
Faceted diamond scribe; blue line across cutting edge
ACCESSORIES
FlipScribe™ shown with Cleaving Kit Extension and Wafer Holder.
Cleaving Kit Extension for FlipScribe
Attaches to FlipScribe rails. The FlipScribe extension is an L-shaped bracket used to support wafer holders and large samples during the scribing process.
7670-07 Cleaving Kit Extension for FlipScribe
Silicon device after scribing and cleaving
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7670-02 1.5" Square Holder 7670-04
2" Round Wafer Holder 7670-05
3" Round Wafer Holder 7670-06
4" Round Wafer Holder 7670-03 45 Degree Holder With Sample
7670-01 FlipScribe Replacement Cartridge
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