EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semiconductor Wafer Coating
The EMS 975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.
The EMS 975 allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials. The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily 'defaults' to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.
The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.
The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use. The EMS-975S is based on the EMS-975, however it has a special load lock door which allows the entry of 8" wafers with carbon coating, or other samples up to 140mm x 140mm square.
FEATURES
Turbomolecular Pump. Automatic pumping sequence. Clean vacuum. Variable outgas control. Evaporation pulse button.
Unique “anti stick” carbon rod gun evaporation assembly (patent pending).
Rack out drawer sample loading system.
Rotating plate specimen table with external accurate tilt control (option).
Large sample capacity,150mm (6") using drawer with up 200mm (8") for top loading.
Sample holders range of options, including grid holders, stub holders.
Carbon and Carbon/Platinum evaporation. Full range vacuum measuring system. Fast pumping cycle. Protective Polycarbonate Implosion Shield.
Selectable evaporation supplies giving x 4 evaporation settings.
Restricted or full vent control to avoid disturbances of samples.
Microcontroller with LCD displays of status and customer data entry for control of systems.
Modular electronics. Bench mounted unit.
Sputter coating (option) for range of metal targets.
Film thickness measurement for carbon and metal depositions.
Product Description Coating sources
The EMS 975 is fitted with a carbon rod gun and metal filament/boat source which can also be used for cleaning TEM and SEM apertures. An optional sputtering source is available.
Work chamber
The borosilicate glass work chamber is 250mm diameter x 300mm and mounted on an aluminium support collar. A tough chamber implosion guard is included as standard. The chamber can accommodate specimens up to 8"/200mm in diameter. A unique rack- out specimen loading system gives the user easy specimen access and the hinged lid assembly makes other areas of the vacuum chamber readily accessible.
Menu-driven control
The menu-driven microcontroller allows the user access to a range of options, but readily ‘defaults’ to optimum operating conditions, allowing both fully-automatic and manual override as required.
Turbomolecular pumping and venting
The EMS 975 uses a modern 100L/s turbomolecular pump backed up by an external rotary vacuum pump (not included, see 91005) with the complete pumping sequence being under fully-automatic control.
Typical chamber set up, showing carbon and metal evaporation sources, specimen stage and optional film thickness monitor (FTM)
The vacuum pump-down sequence is automatically controlled by the system microprocessor. Vacuum measurement is by a combined pirani/penning gauge and is displayed digitally.
Process gases (nitrogen for venting - if fitted - and argon for the optional EMS 350 sputtering attachment) are automatically controlled and can be programmed for use during coating sequences. The vent valve has an adjustable restrictor and programmable vent time to prevent disturbing specimens due to the inrush of gas at the end of the cycle.
A very useful feature of the EMS 975 is ‘vacuum shut-down’, which allows the process chamber to remain under vacuum when not in use. This helps to maintain a high level of system cleanliness and vacuum performance.
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