EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION CALIBRATION STANDARDS & SPECIMENS  Magnification Reference Standards – SPM, AFM, SEM Calibration Standards


EMS offers a series of calibration standards with one and two dimension calibrated patterns. The standards come in two grid spacings – 300 nanometers and 700 nanometers. These standards are created utilizing holographic interference of a particular laser frequency. They are typically accurate to <1% across the entire surface of the standard.


Background


EMS MXS "CE" and "BE" Series SEM magnification reference grating and grids set new standards for sub-micron accuracy and ease-of-use. Designed to meet the requirement for a reasonable cost, accurate sub-micron reference standard, "CE" Series Reference Standards can be tailored to meet a variety of needs. They are ideal for student practice and instruction, testing new ideas or applications, or other uses where you need a good quality standard but don’t want to put an expensive sample at risk. Exceptional accuracy, repeatability, and uniformity are assured since each individual standard is an original or master produced directly from a holographic interference pattern. These reference standards are remarkably dur-able under typical operating conditions. The surface contamination behavior is also very good. There are no better submicron reference standards available in this price range.


"One test site indicated that on a scale of 1 to 5 with respect to ease of use, contrast/ brightness, durability, and accuracy, "CE" Series Reference Standards earn a 4.7 in comparison to other available standards. Comments from various other test sites included "very good contrast/brightness levels at all voltages used," "easy to use," and "could become my secondary standard of choice."


Application


EMS’s MXS "CE" Series Reference Standards provide a calibrated dimension of either 300 or 700 nm nominal length. ("BE" series available only 300 nm).


 The larger dimension provides accurate, mul- tiple period measurement from about 5000X to over 45,000X, while


 The smaller dimension is useful from about 10,000X to over 100,000X.


Throughout this magnification range, these standards provide excellent image contrast, an enormous useful calibration area, and a 3-sigma accuracy of at worst 3%, with typical values around 1%. MXS "CE" and "BE" Series Reference Standards are available as un-mounted 3x4 mm pieces to be mounted by the microscopist. Mounting one of these calibration standards is


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White area material: Tungsten. Black area material: Tungsten or other metal.


Materials: The calibration specimen consists of a silicon chip with a thin (100nm) thick polymer layer containing the pattern and a thin tungsten film over-coating the entire surface. The tungsten film varies from 20nm to 60nm in thickness, depending on the particular model.


easy. The front surface of the sample and the silicon substrate are conductive. Experience indicates that there is, in general, no need to make a special effort to ground the front surface. The use of conductive silver or carbon-loaded paint, conductive epoxies, conductive tape, etc. has all been used to successfully mount "CE" Series standards.


With EMS’s MXS "CE" and "BE" Series Reference Standards, you can:  Quickly check dimensional measurements by mounting one on your specimen stage;


 Perform periodic calibration and perfor- mance checks of your microscope;


 Obtain high magnification, sub-micron scale dimensional accuracy for the first time;


 Accurately determine dimensions from 0.3µm to 30µm all with one calibration arti- facts;


 Analyze your images for pincushion distor- tion, small-scale vibration, or small magnetic field distortions.


The accuracy of the "CE" Series allows the microscopist to use them as a secondary standard. Their accuracy and uniformity make it easy to obtain and document traceability of measurements without placing an expensive, hard to obtain, difficult to use primary calibration standard at risk of contamination or damage.


Certification and Accuracy MXS "CE" Series Reference Standards provides a calibrated dimension of either 300 nm or 700 nm nominal lengths. The actual dimensions of the artifact as delivered will generally not be exactly these values. Both the fabrication process determines the actual dimension and by a second,


This structure has been proven under a wide variety of beam conditions, from 30kV to sub 12 kV. Dimensions: 300nm or 700nm nominal (exact dimension will be provided with sample).


Measurements are made from leading edge to leading edge, etc. Width of individual bars and spaces is not calibrated.


independent measurement after the calibration artifact is manufactured. The expected accuracy of the holographic technique used in the manufacturing process is ±0.1%. Unfortunately, subsequent processing steps degrade this initial accuracy, leading to the 3-sigma accuracy of 3% for the finished product. The second, independent measurement technique has an expected 3-sigma accuracy of 1% or better. Our experience is that the two measurements technique applied to a particular artifact will agree with each other to within 0.5mm.


It is important to remember that the certified dimension in an MXS "CE" and "BE" Series Reference Standard is not just at one unique position on the artifact, but is known at all locations an the standard.


Durability and Charging Effects EMS MXS "CE" and "BE" Series have been tested and evaluated over a broad range of operating conditions, from those found in a tungsten filament system to the highest resolution FEG system. These standards have been found remarkably durable during use, with no beam-induced distortion in the calibrated pattern after as much as one-half hour of imaging time at 50,000X and 20 kV. Charging is minimal to nonexistent, though edge effect can be seen under some conditions. The high contrast and brightness, which can be obtained using these reference standards guarantees good contamination tolerance.


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