EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS 150T Plus (continued)
SPECIFICATIONS Instrument Case
Weight
Packed Dimensions Work Chamber
Display User Interface Sputter Target Specimen Stage
50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.
Vacuum Rotary Pump
Vacuum Measurement Ultimate Vacuum
Optional 5 m3 mbar /hr two-stage rotary pump
with oil mist filter (order separately) Pirani gauge 2 x 10-2
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping with dry nitrogen gas Sputter Vacuum Range
Between 7 x 10-3 for gold
Processes
Sputter Deposition Current Visual Status Indicator
Single target: 1 - 140mA All targets: 60 - 420mA
A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.
The indicator LED shows the following states: • Initialization • Process running • Idle
• Coating in progress • Process completed
• Process ended in fault condition Audio indication also sounds on completion of the process. 3290
3210 3230
3240
3250 3260
3270 3280 and 1 x 10-1 mbar ORDERING INFORMATION
585mm W x 470mm D x 410mm H Total height with coating head open is 650 mm
28.4 kg (Packed 42 kg) 725 mm W x 660 mm D x 680 mm H
Borosilicate glass 150 mm ID x 127 mm H
115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only
EMS 150T S Plus 3380
EMS 150T S Plus Sputter Coater. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator. Includes quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target. Rotating specimen stage, 50 mm diameter, supplied as standard.
EMS 150T E Plus 3390
EMS 150T E Plus Carbon Evaporator. Turbomolecular pumped capacitive touch-screen controlled carbon evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05 mm diameter carbon rods. Supplied with carbon rods (3.05 mm x 300 mm) and a carbon rod shaper (manual operation). Rotating specimen stage, 50 mm diameter, supplied as standard.
EMS 150T ES Plus 3400
EMS 150T ES Plus Combined Sputtering and Carbon Coating System. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognizes which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controlled sputter coater and carbon evaporator with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target, and high vacuum carbon rod evaporation coater, including quick-release carbon rod insert for 3.05 mm diameter carbon rods. Coating inserts are interchangeable. Rotating specimen stage, 50 mm diameter, supplied as standard.
Options and Accessories
Including details of coating head inserts and specimen stages fitted as standard. Coating head options
A range of interchangeable, plug-in style coating head inserts are available: 3200
Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54 mm x 0.3 mm thick chromium (Cr) target as standard. For additional targets see Sputtering Targets section
Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly.
Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical (less wastage). Carbon fiber evaporation head insert
Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat.
Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens
Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS 150T Plus when bench depth is limited
3300
13530 27691 3320
182
Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited Spare quartz crystal for FTM. Standard coating shield assembly
Extended glass cylinder assembly, 220 mm H
Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)
each each
Carbon rod evaporation head insert (for 3.05 mm Ø rods) each
each each
each each each
each each each each
each
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