EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION AFM & STM SUPPLIES Silicon Wafers for AFM, STM
Ultra-Flat Silicon Wafers These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.
SPECIFICATIONS Material:
Diameter:
Orientation: Type/Dopant: Grade:
4" 6" 8" Silicon Silicon Silicon 100 mm 150 mm 200 mm <100> <100> <100> P/Boron P/Boron P/Boron Prime/CZ Virgin
Prime/CZ Virgin 675µm ±20µm
Growth Method: CZ CZ CZ Resistivity: Thickness: TTV:
SFPD: Warp: Bow:
Particles:
Front Surface: Back Surface: Flat:
Site Flatness: Roughness:
Description Gold Coated Specimen Discs
Prime/CZ Virgin
10-20 Ohm-cm 10-20 Ohm-cm 10-20 Ohm-cm 525µm ±20µm
725µm ±20µm
<4.00µm <4.00µm <4.00µm <2.0µm <2.0µm <2.0µm ≤30µm ≤30µm ≤30µm ≤30µm ≤30µm ≤30µm ≤20@≥0.3µm ≤20@≥0.3µm ≤20@≥0.3µm Polished Polished Polished Etched Etched Etched
2 per SEMI Standard 1 per SEMI Standard 2 per SEMI Standard <2.0µm <2.0µm <2.0µm Typically 2-3Å
Typically 2-3Å
ORDERING INFORMATION Cat. No.
71893-01 71893-02 71893-03
Ultra-Flat Silicon Wafer, 4" Ultra-Flat Silicon Wafer, 6" Ultra-Flat Silicon Wafer, 8"
Silicon Wafers Type P
These silicon wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.
SPECIFICATIONS Material
Diameter
1" 2" 3" 4" 6" Silicon Silicon Silicon Silicon Silicon 25 mm 50 mm 76 mm 100 mm 150 mm
Orientation <100> <100> <111> <100> <100> Resistance Type P
SiO2 top coating None None None None None Wafer Thickness 10-12 mill 9-13 mill
Roughness 2nm 2nm 2nm 2nm 2nm TTV
Polished
71893-04 71893-05 71893-06 71893-07 71893-08
26
ORDERING INFORMATION Cat. No.
Description
Silicon Wafer Type P, 1" Silicon Wafer Type P, 2" Silicon Wafer Type P, 3" Silicon Wafer Type P, 4" Silicon Wafer Type P, 6"
1-30 Ohms 1-30 Ohms 1-30 Ohms 1-30 Ohms 1-30 Ohms
Boron - Boron - Boron - Boron - Boron - 1 primary flat 1 primary flat 1 primary flat 1 primary flat 1 primary flat
13.6-18.5 mill 18.7-22.6 mill 23.6-25.2 mill
(254-304µm) (230-330µm) (345-470µm) (475-575µm) (600-690µm) <20µm
on one side on one side on one side on one side on one side
Qty. each each each each each
These are high quality metal discs with smooth edges and flat surfaces for use in Atomic force Microscopy.
Cat. No.
75010-10 75010-12 75010-15 75010-20
Description
10mm Metal Specimen Discs for AFM
12mm Metal Specimen Discs for AFM
15mm Metal Specimen Discs for AFM
20mm Metal Specimen Discs for AFM
Qty.
50/pk 50/pk 50/pk 50/pk
Typically 2-3Å
Qty. each each each
These metal specimen discs are high quality – made of magnetic stainless steel coated with 1µm gold. They have smooth edges and consistently flat surfaces to ensure secure holding. Specimens can be mounted directly on the metal discs with double sided tape, epoxy or conductive paste. If a mica specimen support is needed, the mica discs can be easily mounted on the metal support discs.
These discs offer excellent resistance to electromigration, high electrical and thermal conductivity, and high temperatures making them excellent substrates for mounting specimens.
Packaged in a polystyrene disc storage box. Cat. No.
Description
75011-10 75011-12 75011-15 75011-20
10mm Gold Coated Specimen Discs for AFM
12mm Gold Coated Specimen Discs for AFM
15mm Gold Coated Specimen Discs for AFM
20mm Gold Coated Specimen Discs for AFM
Qty. 4/pk 4/pk 4/pk 4/pk
Metal Specimen Discs for use with the Atomic Force Microscope
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