EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS 150V Plus Automatic Coater
For ultra-fine coatings QUICK OVERVIEW
The EMS 150V Plus is optimized for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidizing metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra- high-resolution applications (above x 200,000 magnification).
KEY FEATURES Ultimate vacuum of 1x10-6
mbar
New multi-color LED visual status indicator 16Gb of flash memory can store more than 1000 recipes New software sorts recipes per user according to recent use Multiple-user profiles can be set up on one machine New touch and swipe capacitive screen
PRODUCT DESCRIPTION The EMS 150V Plus is available in three configurations:
EMS 150V S Plus — an automatic sputter coater for oxidizing metals with ultra-fine grain size. Available sputtering targets include chromium, iridium and all noble metals
EMS 150V E Plus — an automatic carbon coater (rod/cord) for TEM applications. For carbon coating TEM grids.
EMS 150V ES Plus — a combined system capable of both sputtering and carbon coating. The deposition head inserts can be swapped in seconds. Metal evaporation/aperture cleaning option available.
New user interface has been thoroughly updated: • Capacitive touch screen is more sensitive for ease of use
• User interface software has been extensively revised, using a modern smartphone-style interface
• Comprehensive context-sensitive help screen
• USB interface allows easy software updates and backing up/copying of recipe files to USB stick
• Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
• 16GB of flash memory can store more than 1000 recipes • Dual-core ARM processor for a fast, responsive display
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.
Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.
System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.
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Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating recipes are already stored but also allows the user to create their own. Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.
Automatic, controlled carbon rod evaporation for TEM applications
Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of “sparking” that is a common feature of less advanced coaters.
For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.
Recommended applications for EMS 150 V Plus: • Ultra-high-resolution magnification SEM
• Carbon coating of TEM grids • Protective platinum layers for FIB
• R&D of corrosion-, friction-, and wear- protective layers • Protective layers on medical devices • BSE imaging
• EDX, WDS, EBSD analysis • Carbon coating of replicas
• Nano-technology e.g. Zeolites, polymer nanobrushes These products are for Research Use Only.
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