EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
Vacuum, Automatic Valving and Controlled Venting
EMS GloQube™ Glow Discharge System for TEM and Surface Modification (continued) SPECIFICATIONS
The GloQube™ has automatic valving between chambers which maintains cleanliness by preventing cross-contamination. At the end of a process run, automatic soft venting to atmosphere through filtered inlets ensures TEM grids are not disturbed. The GloQube™ requires a single vacuum pump working in the 0.1 to 1 mbar range. A typical pump time to operational vacuum is 60 seconds.
Power and Processes Plasma current HV power supply Maximum voltage
Electrode polarity – clean chamber vapor chamber Sample stage
Safety Chamber vent inlets Filtered air inlets with slow vent to minimize sample disturbance
On-board reagent storage Reagents (e.g. methanol or alkylamine) are contained in reusable sealed glass vials to minimize exposure to hazards. (GloQube-D only)
High voltage safety interlocks Hardware safety interlocked and software for process control Vacuum
Vacuum control EMS GloQube-D and Optional Pfeiffer DUO 6 Rotary Pump
Touch Screen Control – Rapid Data Input, Simple Operation
The intuitive touch screen allows multiple users to rapidly input and store preferred process "recipes". Typical default glow discharge protocols are loaded as standard. Additionally, help files and useful maintenance data such as system on time and time since last clean are readily available to the operator. An Ethernet communications port is included for software updates.
Working vacuum range Vacuum pump
minimum requirements Pumping time
Vacuum isolation
User Interface User interface
Integrated pirani gauge 0.1 to 1 mbar 6 m3
Inlet flange: KF 16 Typical pump time to an operational vacuum of 0.27 mbar in 60 sec.
Isolation valves to switch vacuum and prevent process chamber cross-contamination
Full graphical interface with touch screen buttons and controls. In addition to displaying profiles, parameters, help screen and maintenance information are available
Profiles and profile logging Capability to store 100 user profiles (name, date, time, vacuum, current and polarity)
Dimensions and Communications Chamber size Instrument size
Instrument weight Pump (optional) Pump weight
Instrument power rating
100 mm W x 100 mm H x 127 mm D (3.94" x 3.94" x 5") 336 mm H x 364 mm D (13.2" x 14.3") 19.5 kg (42.9 lbs) (GloQube-D)
391 mm W x 127 mm D x 177 mm H (15.4" x 5" x 7") 16 kg (35.3 lbs)
Footprint with optional pump 366 mm W x 600 mm D x 336 mm H (14.4" x 23.6" x 13.2") Power requirements
120 V 60 Hz, 15 A or 230 V 50 Hz, 10 A
Optional pump power rating 115/230 V 60/50 Hz 450 W Communication port
Stored Profiles
ORDERING INFORMATION Cat No.
Description
EMS-Glo-2 EMS GloQube, Dual chamber glow discharge system. Accessory kit, including: mains power lead, rotary pump power lead, oil mist filter and clamp, 750 mm long flexible stainless steel vacuum tube with clamps, fuses, glass vials, vial caps and sealing washers, needle (spare). Vacuum pump to be ordered separately.
Vacuum Pumping 91003 96000
5 m3 /hr Pfeiffer DUO 6 two-stage rotary vacuum pump with oil mist filter Oil mist filter (spare)
Options, accessories and spares EMS-Glo-11 Microscope Slide Tray EMS-Glo-12 Glass Vial
EMS-Glo-13 Glass Vial Caps A Typical Process Run
100-240 V AC 60/50 Hz 700 VA including pump, IEC inlet Ethernet port for instrument software updates
Qty.
each each
each each
10/pk 3/pk
EMS-Glo-14Needle each EMS-Glo-15 Door Seal
each 169 /hr, 3600 l/m, 0.03 mbar ultimate vacuum.
1-40 mA 30 W 800 V
DC glow positive DC glow negative DC glow positive DC glow negative
125 x 100 mm with location for two 25 x 75 mm (1" x 3") glass slides
Sample stage operational height Adjustable 12.5 mm (0.5"), 22.5 mm (0.9") or 35 mm (1.38") Pump hold time requirement 0-24 hours Process time
1-600 seconds
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