EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION


CALIBRATION STANDARDS & SPECIMENS  SPM Calibration Specimens


Features and Benefits:  Easier testing of your SPM.  Improved accuracy of critical dimension measurements.  Accuracy: 0.5% (1 std. dev.).  Holographic fabrication - assures high accuracy and precision.  Pattern height > 100nm - provide excellent image contrast.  Uniform coverage of entire chip - save time (can image anywhere).


Description: Nominal calibrated dimensions: 300 or 700nm.


Calibration certificate: supplied with each sample, stating the dimension to the nearest 1nm. Pattern types: 1- or 2-Dimensional. The calibrated dimension is the same for both axes for the 2-D standard. Feature geometry: -parallel ridges (1-D, 300 or 700nm) -cylindrical posts (2-D 300nm) -diamond-shaped posts (2-D 700nm)


Physical Size: 3 mm x 4 mm x 0.5mm Substrate: Silicon wafer Top Surface: Tungsten film


The 1-D standards can be scanned using any AFM mode, including contact mode. The 2-D standards can be scanned using modes such as Tapping Mode™ intermittent contact, and non-contact.


,  Model 150-1D Model 150-1D


Accurate measurements of sub 0.5 micron features are increasingly important as nanotechnology develops and as conventional microfabricated structures (semiconductors, magnetic data storage devices, optical data discs) shrinking. The model 150-1D with a nominal period (pitch) of 150nm, one dimensional, fabricated on a transparent substrate (Aluminum lines on glass) is the new tool to support this work.


 Model 750-HD


High Durability Calibration Reference Specimen for AFM and STM Each specimen is supplied with a calibration certificate.


Can be used for AFM, STM and SEM. Has been used successfully in a hot water AFM.


Model 750-HD 700-1D


Nominal pattern dimensions: ....................................Pitch 750 nm Height 100 nm


Nominal specimen dimensions:................................6.35 m diam., 0.3 mm thick


Composition: ..................................................................Solid Nickel


Parallel Ridges, Pitch 700 W-coated Photoresist on Si use contact or TappingMode


References:


1. Pereira, D.E.D. & Claudio-da-Silva, Jr., E. "Improvement of AFM as an analytical Instrument for Residual Lignin Characterization" in: Proceedings International Symposium on Wood and Pulping Chemistry, Helsinki, Finland, June 1995. 2. Pereria, D.E.D, Chernoff, D., Claudio-da-Silva, Jr. E., & Cemuner, B.J., "The use of AFM to investigate the delignification process: Part I –AFM performance by differentiating pulping pro- cesses", to be published.


98 700-2D


Array of Posts, Pitch 700 W-coated Photoresist on Si use TappingMode


 Model PT


Phase Imaging Test Specimen (verify Tapping- Mode™ phase contrast and resolution). Phase Imaging is a sharp probe, which is brought into proximity with the specimen surface. The probe is oscillated vertically near its mechanical resonance frequency. As the probe lightly taps the surface, the amplitude of oscillation is reduced and the AFM uses this change in amplitude in order to track the


surface topography. In addition to its amplitude, the probe motion can be characterized by its phase relative to a driving oscillator. The phase signal changes when the probe encounters regions of different composition. Phase shifts are registered as bright and dark regions in phase images, comparable to the way height changes are indicated in height images.


Phase images often show extraordinary contrast for many composite surfaces of technological and scientific interest. These include contamination deposits, discontinuous (i.e. defective) thin films, devices built of composite materials (e.g. magnetic recording heads), and cross-sectional specimens of composite materials. Both inorganic and organic materials can be examined. We have found that phase imaging is more convenient and gentler than other methods, which are based on contact mode operation. It routinely achieves lateral resolution of 10 nm.


 Models 300-2D, 300-1D, 700-2D and 700-1D All mounted on 15 mm steel disk.


300-1D


Parallel Ridges, Pitch 288 W-coated Photoresist on Si Use contact or TappingMode


300-2D


Array of Posts, Pitch 297 Al bumps on Si


Use contact or TappingMode


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