EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES  EMS 150T Plus (continued) Ø can accommodate six standard stubs. Height can be pre-set.


• Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.


• Variable angle, rotary planetary stage for heavily contoured samples. • Large flat rotation stage with offset gear box for 4"/100 mm wafers. • Rotation stage for glass microscope slides. Other options are available on request. Safety


The EMS 150T Plus meets key industry CE standards • All electronic components are protected by covers • Implosion guard prevents user injury in event of chamber failure


• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened • Electrical interlocks remove power when source head cover opened • Overheating protection shuts down power supply


SPECIFICATIONS Instrument Case


Weight


Packed Dimensions Work Chamber


Display User Interface Sputter Target Specimen Stage


50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.


Vacuum Rotary Pump


Vacuum Measurement Ultimate Vacuum


Optional 5 m3 mbar /hr two-stage rotary pump


with oil mist filter (order separately) Pirani gauge 2 x 10-2


Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping with dry nitrogen gas Sputter Vacuum Range


Between 7 x 10-3 for gold


Processes


Sputter Deposition Current Visual Status Indicator


Single target: 1 - 140mA All targets: 60 - 420mA


A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.


Standard rotation stage and optional film thickness monitor


Variable angle tilt-rotate stage and optional film thickness monitor


The indicator LED shows the following states: • Initialization • Process running • Idle


• Coating in progress • Process completed


• Process ended in fault condition Audio indication also sounds on completion of the process. and 1 x 10-1 mbar


585mm W x 470mm D x 410mm H Total height with coating head open is 650 mm


28.4 kg (Packed 42 kg) 725 mm W x 660 mm D x 680 mm H


Borosilicate glass 150 mm ID x 127 mm H


115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display


Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due


Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only


Rotary planetary stage option


Optional flat rotation stage for 100 mm/4 wafers


182


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76  |  Page 77  |  Page 78  |  Page 79  |  Page 80  |  Page 81  |  Page 82  |  Page 83  |  Page 84  |  Page 85  |  Page 86  |  Page 87  |  Page 88  |  Page 89  |  Page 90  |  Page 91  |  Page 92  |  Page 93  |  Page 94  |  Page 95  |  Page 96  |  Page 97  |  Page 98  |  Page 99  |  Page 100  |  Page 101  |  Page 102  |  Page 103  |  Page 104  |  Page 105  |  Page 106  |  Page 107  |  Page 108  |  Page 109  |  Page 110  |  Page 111  |  Page 112  |  Page 113  |  Page 114  |  Page 115  |  Page 116  |  Page 117  |  Page 118  |  Page 119  |  Page 120  |  Page 121  |  Page 122  |  Page 123  |  Page 124  |  Page 125  |  Page 126  |  Page 127  |  Page 128  |  Page 129  |  Page 130  |  Page 131  |  Page 132  |  Page 133  |  Page 134  |  Page 135  |  Page 136  |  Page 137  |  Page 138  |  Page 139  |  Page 140  |  Page 141  |  Page 142  |  Page 143  |  Page 144  |  Page 145  |  Page 146  |  Page 147  |  Page 148  |  Page 149  |  Page 150  |  Page 151  |  Page 152  |  Page 153  |  Page 154  |  Page 155  |  Page 156  |  Page 157  |  Page 158  |  Page 159  |  Page 160  |  Page 161  |  Page 162  |  Page 163  |  Page 164  |  Page 165  |  Page 166  |  Page 167  |  Page 168  |  Page 169  |  Page 170  |  Page 171  |  Page 172  |  Page 173  |  Page 174  |  Page 175  |  Page 176  |  Page 177  |  Page 178  |  Page 179  |  Page 180  |  Page 181  |  Page 182  |  Page 183  |  Page 184  |  Page 185  |  Page 186  |  Page 187  |  Page 188  |  Page 189  |  Page 190  |  Page 191  |  Page 192  |  Page 193  |  Page 194  |  Page 195  |  Page 196  |  Page 197  |  Page 198  |  Page 199  |  Page 200  |  Page 201  |  Page 202  |  Page 203  |  Page 204  |  Page 205  |  Page 206  |  Page 207  |  Page 208  |  Page 209  |  Page 210  |  Page 211  |  Page 212  |  Page 213  |  Page 214  |  Page 215  |  Page 216  |  Page 217