EMS Materials Science & Metrology 2019/2020

EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES

ORDERING INFORMATION (continued)  EMS 150T Plus (continued)

3530 3540

3550 3560 3570 3580 3590 3595

12097 Microscope slide stage Rotation stage

3410-2 3411

Wafer stage 4513 Rotacota planetary stage

Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted each

Specimen stages

The EMS 150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage): 3330

Rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment

3340 each

Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Tilt angle can be preset. 50 mm Ø specimen platform with six stub positions

for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

3350 3360 3370 23850

Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions

for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm

Rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used Tilt stage sub-assembly 4"

Evaporation Supplies 73830-SP 73810-SP

Carbon supplies 3500

3510 3520 3525

Tungsten wire baskets – pack of 10 Molybdenum boats – pack of 10

Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) pack of 10

Carbon rods – 6.15 mm Ø x 50 mm length (shaped) pack of 10

Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10

Carbon rods – 3.05 mm Ø x 100 mm length (unshaped) pack of 10

each each

each each

10/pk 10/pk

10/pk 10/pk 10/pk 10/pk

each

3411-2 3412 3413 3414 3415 3416 3417 3418 3419 3420 3421 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435 3436 3437

07803 13233 13235 27607 G6260 10068 10429 3610

3620 3630

Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10

Carbon fiber cord – high purity – 1m Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m Manual rod shaper for 6.15 mm Ø carbon rods Manual rod shaper for 3.05 mm Ø carbon rods Wedge Tool

Sputtering Targets 3410

57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold

57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper 57 mm Ø x 0.3 mm Chromium 57 mm Ø x 0.5 mm Tungsten 57 mm Ø x 1.5 mm Chromium 57 mm Ø x 0.2 mm Tungsten 54 mm Ø x 1.5 mm Carbon 57 mm Ø x 0.1 mm Aluminum

57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 1.5 mm Titanium

57 mm Ø x 0.3 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Gold

57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.5 mm Titanium 57 mm Ø x 0.1 mm Iron 57 mm Ø x 0.3 mm Iridium 57 mm Ø x 0.1 mm Cobalt 57 mm Ø x 0.1 mm Tin

57 mm Ø x 0.1 mm Molybdenum 57 mm Ø x 0.3 mm Magnesium 57 mm Ø x 0.1 mm Tantalum

57 mm Ø x 3 mm Indium Tin Oxide (90/10)

Other consumables and spare kits 3600

Metal evaporation basket – pack of 10 (for use with metal evaporation head) Basic Oil Mist Filter (spare) Rotary Pump Oil (spare), 1L Rotary Pump Oil (spare), 5L Non-seal L Gasket Glass cylinder 6"

AdditionalÂ glass cylinder assembly ExtendedÂ glass cylinder assembly

Two-year spares kit for EMS 150V S Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, quartz crystals, O-rings

Two-year spares kit for EMS 150V E Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings

Two-year spares kit for EMS 150V ES Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings

10/pk each each each each each each each each

each each each each each each each each each each each each each each each each each each each each each each each each each each each each each each

10/pk each each each each each each each

kit kit kit 183

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