EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS 300T D Plus (continued) ORDERING INFORMATION
EMS300T D Plus
Dual Target Sequential Sputtering System; includes a 57 mm Ø x 0.3 mm chromium (Cr) target and a 57 mm Ø x 0.1 mm thick gold (Au) target . A flat rotation stage for 4"/100 mm wafers is included.
Rotary pump requirements (needs to be ordered separately) 91003
6548 6550-A
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter XDS 5 Scroll Pump
Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter
Specimen stages 6790-S
6800-S 6801
Swinging arm stage drive, a stage drive and positioning mechanism which positions the stage under the correct target. Also provides rotation drive to the stage. Rotation Speed Max 38 rpm Min 14 rpm
Rotating specimen stage for 6" (152 mm) wafers, with rotation variable between preset limits.
Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8" pin stubs. The stage rotation speed is variable between preset limits. The target to stage height is variable between 0 mm and 42 mm for the standard stage. When used with the extended height cylinder the target to stage height would be an additional 87 mm.
6802
50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Stage rotation speed variable between preset limits. Note: Target to stage height is variable between 10 mm and 53 mm for the standard stage. The stage is supplied with two mounting pillars; one provides 10 mm to 32 mm target to stage distance and the other 31 mm to 53 mm. An adjustable stop is used to set the height. When used with the extended height cylinder (optional accessory) the target to stage height would be an additional 87 mm.
6803
50 mm Ø rotary tilting stage. A rotary planetary style stage with a variable tilt angle from horizontal to 30 degrees. The platform has six positions for either 6.5 mm, 10 mm and 15 mm disc stubs or 1/8" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder.
6804
A 90 mm Ø specimen stage for glass microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six 1/8" SEM pin stubs. The stage rotation speed is variable between preset limits. A gear box is included to allow the optional FTM to be used.
Options and Accessories 6805
each each
each 6810
each each
6811 6812 each 6808 6809
6806 6807
Spare quartz crystal.
Extended height vacuum chamber (214 mm in height, the standard chamber is 127 mm high). Ideal for increased source to specimen distance and for coating of larger specimens.
Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS300T D Plus when bench depth is limited.
each each each
A lockable emergency stop (e-stop) switch which can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. Note: the addition of the e-stop does not inhibit or replace the normal On/Off switch function. The e-stop can be retrofitted to existing systems. each
Full range, active vacuum gauge capable of measurement over the range of 1000 mbar to 5 x 10-9 mbar. Typical ultimate vacuum of the EMS300T D Plus is 5 x 10-5
mbar. Note: this must be factory fitted.
Coating shields. Can be fitted to protect large surfaces from coating deposition and can be easily removable for cleaning.
each
Spares kit, including: spare standard glass cylinder, one chromium (Cr) and one (Au) sputtering target, vacuum tubing with coupling insert, argon gas tubing, two sputter head magnets, rotary pump oil mist filter, FTM quartz crystal and fuses.
Sputter targets each each each
Dual channel film thickness monitor (FTM). A fully integrated system using the EMS300T D Plus touch screen display for the control and display of all FTM functions. The FTM allows for the automatic termination of the metal sputtering process at a pre-selected thickness value. The rate for the sputtering processes is displayed in nm/min, with a resolution of 0.1 nm. Two FTM crystal holders are fixed in the chamber to give optimal position for both targets and to coat one material per crystal. Operating crystal frequency is in the 5 MHz to 400 kHz operating range. Includes two spare quartz crystals
Note: The EMS 300T T Plus is fitted as standard with three 0.3 mm chromium (Cr) targets (3417). Other optional targets are available (three required): 3410 3411 3412 3413 3414 3415 3416 3417 3418 3419 3420 3421 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435 3436 3437
57mm Ø x 0.1mm Gold
57mm Ø x 0.1mm Gold/Palladium (80/20) 57mm Ø x 0.1mm Platinum 57mm Ø x 0.1mm Nickel 57mm Ø x 0.1mm Silver 57mm Ø x 0.1mm Palladium 57mm Ø x 0.1mm Copper 57mm Ø x 0.3mm Chromium 57mm Ø x 0.5mm Tungsten 57mm Ø x 1.5mm Chromium 57mm Ø x 0.2mm Tungsten 54mm Ø x 1.5mm Carbon 57mm Ø x 0.1mm Aluminium
57mm Ø x 0.1mm Platinum/Palladium (80/20) 57mm Ø x 1.5mm Titanium
57mm Ø x 0.3mm Platinum/Palladium (80/20) 57mm Ø x 0.3mm Gold
57mm Ø x 0.3mm Gold/Palladium (80/20) 57mm Ø x 0.3mm Platinum 57mm Ø x 0.5mm Titanium 57mm Ø x 0.1mm Ironeach 57mm Ø x 0.3mm Iridium 57mm Ø x 0.1mm Cobalt 57mm Ø x 0.1mm Tin
57mm Ø x 0.1mm Molybdenum 57mm Ø x 0.3mm Magnesium 57mm Ø x 0.1mm Tantalum
57mm Ø x 3mm Indium Tin Oxide (90/10)
each each each each each each each each each each each each each each each each each each each each each each each each each each each each
each each
each
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