EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS150GB Turbo-Pumped Sputter Coater/Carbon Coater — For Glove Box (continued)
Touch screen user interface
Enclosed in a stainless steel case and mounted at a convenient position outside the glove box, the touch screen allows multiple users to input and store coating protocols.
Vacuum module - including "vacuum shutdown" and glove box pressure interlock
The vacuum module houses all the working components, including the efficient 70L/s air-cooled
Touch screen control module
turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full range active gauge is fitted as standard to monitor the vacuum.
The EMS150GB includes "vacuum shutdown", a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.
A unique feature of the EMS150GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and shuts off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.
The vacuum chamber is 214mm high to allow for increased source to substrate distances required for coating large specimens. It has an external diameter of 165mm and comes with an integral implosion guard. The chamber assembly is easily removed to allow specimen exchange and chamber cleaning.
A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190mm above the base plate; other stages are available as options.
Carbon rod evaporation The high vacuum carbon rod coating insert (3230) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods and the advanced “anti-stick” carbon rod evaporation gun offers simple operation and reproducible results. A carbon fibre evaporation insert (3250) is available as an option (see Options and Accessories).
Metal evaporation/ aperture cleaning option A quick change insert (3260) allows metal evaporation from tungsten baskets or molybedenum boats - ideal for thin film applications. For ease of set up in a glove box, the metal charge can be loaded into the evaporation source away from the vacuum chamber.
Each of the above configurations can be used with a range of optional accessories. See options and Accessories for details.
Rapid data entry At the operational heart of EMS150GB is a simple colour touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are provided.
Vacuum chamber assembly
Sputter coating and carbon coating as standard, plus an option for metal evaporation
"Intelligent" Quick-change deposition inserts The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.
High resolution sputter coating
The EMS150GB features a high-resolution sputter coater insert (3200) for oxidising and non-oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FE-SEM applications. Please see Options and Accessories for details of available metal targets.
Coating inserts included with the EMS150GB A range of interchangeable, plug-in style coating head inserts are available:
• Sputtering head insert (3200) is suitable for oxidising and non-oxidising metals. Supplied with a 54mm Ø x 0.3mm thick chromium target (3417) as standard. For additional targets see "Ordering Information" section.
Note: changing sputtering targets is easy, but additional sputter head inserts can be purchased for even quicker coating material change - see (3210)
• Carbon rod evaporation head insert and accessories for 3.05mm Ø rods (3230)
Optional coating inserts
Carbon rod evaporation head insert for 6.15mm Ø rods (3240). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage)
continued > > > > 185 Metal evaporation insert option
Carbon rod evaporation insert
Carbon fibre evaporation insert option
Additional Information Options and Accessories (including details the standard specimen stage)
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