EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS 7620 “Mini” Sputter Coater/Glow Discharge
The EMS 7620 is a compact, low cost SEM sputter coater that comes complete with a glow discharge option as a standard. When combined with the optional carbon attachment EMS 7640-CF it makes the ideal low cost SEM sputtering and carbon coating system package. The EMS 7620 is robust, easy to operate and is backed up with a three-year warranty.
Features
Low cost Simple operation
Magnetic deflection sputter coating head
Compact design
Carbon fiber evaporation option
Adjustable height specimen Easy operation
The EMS 7620 is ideally suited to the budget-conscious user who none-the- less demands quality results from an easy-to-use instrument. Designed for routine applications, the EMS 7620 uses a basic magnetron sputter head with a simple-to-replace disc target (gold/palladium (Au/Pd) as standard). The head is hinged for easy operation and fitted with electrical safety interlocks.
To prevent accidental damage the high voltage lead is shielded. The plasma current is variable by adjustment of the vacuum level using an argon leak valve with the plasma voltage pre-set. For maximum sputter coating efficiency the gas injector system ensures that argon gas enters the chamber close to the plasma discharge. Venting is to argon.
Fast cycle times
The 100mm/4" diameter Pyrex cylinder is mounted on an aluminium collar and sealed with O rings. The small vacuum chamber means pump-down times and cycle times are fast; it also allows a small economical rotary pump to be used.
The specimen stage is height-adjustable over a wide range and can easily be removed to accommodate larger specimens. The system is controlled manually by a 180-second timer with 15-second resolution. Pressure and plasma current are monitored by analogue meters.
Glow discharge (hydrophilisation)
A three-way switch on the front panel allows the EMS 7620 to be switched to glow discharge mode.
Freshly-made transmission electron microscopy (TEM) carbon support films tend to have a hydrophobic surface that hinders the collection of TEM sections from the surface of water baths and prevents the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, carbon film can be made hydrophilic and negatively-charged, thus allowing collection of TEM sections and easy spreading of aqueous suspensions.
Other possible treatments include magnesium acetate treatment to create hydrophobic and positively-charged surfaces. If alkylamine is used as a process gas, the carbon film surface will become hydrophobic and positively- charged, while using methanol as a process gas results in the surface becoming hydrophobic and negatively-charged. Such treatments can allow the optional absorption of selected biomolecules.
The EMS 7620 also comes complete with 1m x 12mm bore vacuum hose and fittings, and requires only the addition of a rotary pump with a capacity of 50L/m or greater - see Options and Accessories.
170 stage
Easy to change sputter tar- gets - gold/palladium (Au/Pd) standard
Built to all the latest safety standards - features include positive break elec- tro-mechanical interlock
which ensures the sputter coating head is electrically isolated when the optional carbon attachment is in use
Robust and reliable Three-year warranty
Glow discharge as a stan- dard
Specifications
Dimensions:........................340mm W x 130mm D x 250mm H (unpacked) excluding chamber
Site Requirements: Electrical: Ensure that a suitable mains electricity supply (110VAC - 20A or 240VAC - 13A, frequency 50/60Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency. The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 250VA excluding the rotary pump. The rotary pump outlet is rated at 230V at 10A or 110V at 16A. The 240V pump outlet uses either a three-pin plug (404440310) or 110V standard US plug - both supplied. Sputtering Gas: Ensure that a suitable gas supply is available, such as a commercial cylinder of argon gas (Zero Grade) fitted with a two-stage regulator, in order to deliver gas at a pressure of around 5-10psi (0.5bar). Vacuum Pump: Ensure that a suitable vacuum pump is available. The work chamber has to be evacuated to less than 10-2mbar. This can be achieved in a reasonable time (depending on the cleanliness of the chamber) using a floor- mounted 50L/m or 90L/m two-stage rotary pump. Alternatively you can use a 30L/m desk-top mounted two-stage rotary pump, preferably incorporating an anti suck-back device and fitted with an oil mist filter on the exhaust port. Where a rotary pump is used, ensure that it has been filled with oil, in accordance with the manufacturer’s instructions. The exhaust should be filtered or expelled to a safe area. All pumps we supply are fitted with an exhaust filter. Carbon evaporation attachment (optional):The EMS 7640-CF Carbon Accessory Power Supply can be used in conjunction with the EMS 7640 ‘Mini’ Sputter Coater. The units are supplied for either 230V or 110V operation at 50/60Hz. Ensure that a suitable mains electricity supply (110VAC - 20A or 240VAC - 13A, frequency 50/60Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
Space requirement: 340mm W x 320mm D x 310mm H (including chamber and sputtering head). Weight: 14kg. Additional space is required for the rotary pump, which can be located either on the floor or on the bench with the coater.
Options and Accessories A carbon coating accessory (EMS 7640-CF) which consists of an evaporation power supply and carbon fiber head is available. Fitting the optional carbon evaporation attachment is simple. The normal sputtering head is tilted back and replaced with the carbon fiber head. Connection is then made to the power supply. To ensure that the exposed sputtering head cannot be powered when the add-on carbon head is under vacuum, a positive-break mechanical interlock ensures electrical isolation of the sputtering head. We also offer a ‘stand alone’ SEM carbon coater, see the EMS 450X.
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84 |
Page 85 |
Page 86 |
Page 87 |
Page 88 |
Page 89 |
Page 90 |
Page 91 |
Page 92 |
Page 93 |
Page 94 |
Page 95 |
Page 96 |
Page 97 |
Page 98 |
Page 99 |
Page 100 |
Page 101 |
Page 102 |
Page 103 |
Page 104 |
Page 105 |
Page 106 |
Page 107 |
Page 108 |
Page 109 |
Page 110 |
Page 111 |
Page 112 |
Page 113 |
Page 114 |
Page 115 |
Page 116 |
Page 117 |
Page 118 |
Page 119 |
Page 120 |
Page 121 |
Page 122 |
Page 123 |
Page 124 |
Page 125 |
Page 126 |
Page 127 |
Page 128 |
Page 129 |
Page 130 |
Page 131 |
Page 132 |
Page 133 |
Page 134 |
Page 135 |
Page 136 |
Page 137 |
Page 138 |
Page 139 |
Page 140 |
Page 141 |
Page 142 |
Page 143 |
Page 144 |
Page 145 |
Page 146 |
Page 147 |
Page 148 |
Page 149 |
Page 150 |
Page 151 |
Page 152 |
Page 153 |
Page 154 |
Page 155 |
Page 156 |
Page 157 |
Page 158 |
Page 159 |
Page 160 |
Page 161 |
Page 162 |
Page 163 |
Page 164 |
Page 165 |
Page 166 |
Page 167 |
Page 168 |
Page 169 |
Page 170 |
Page 171 |
Page 172 |
Page 173 |
Page 174 |
Page 175 |
Page 176 |
Page 177 |
Page 178 |
Page 179 |
Page 180 |
Page 181 |
Page 182 |
Page 183 |
Page 184 |
Page 185 |
Page 186 |
Page 187 |
Page 188 |
Page 189 |
Page 190 |
Page 191 |
Page 192 |
Page 193 |
Page 194 |
Page 195 |
Page 196 |
Page 197 |
Page 198 |
Page 199 |
Page 200 |
Page 201 |
Page 202 |
Page 203 |
Page 204 |
Page 205 |
Page 206 |
Page 207 |
Page 208 |
Page 209 |
Page 210 |
Page 211 |
Page 212 |
Page 213 |
Page 214 |
Page 215 |
Page 216 |
Page 217
