EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS 300T T Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater
QUICK OVERVIEW
The EMS300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8"/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE- SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head. For sequential coating, see the EMS300T D Plus.
KEY FEATURES Ultimate vacuum of 1x10-6
mbar or less possible
New touch and swipe capacitive screen USB port for upgrades and download of process log files Multiple-use profiles can be set up on one machine
New software sorts recipes per user according to recent use
16GB of memory can store more than 1000 recipes New multi-color LED visual status indicator Interchangeable stage options
Three sputter heads for larger area deposition of different materials
PRODUCT DESCRIPTION Detachable chamber with built-in implosion guard
Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for improved uniformity for sputtering and to hold larger substrates.
Triple Target Sputtering System
The EMS 300T T Plus is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, 'single target' mode can be selected. They are ideal coaters for the preparation of large
Recommended applications for EMS300T T Plus: • Wafer Inspection
• Multiple sample preparation for SEM These products are for Research Use Only.
specimens for examination by SEM, FEG-SEM. To ensure even deposition, the EMS 300T T Plus coaters are fitted with a rotating specimen stage and three individual magnetron target assemblies, which enhance the efficiency of the process by using low voltages.
Multiple stage options
The EMS 300T T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and the rotation speed is variable between pre-set limits. Flat rotation stage for 200 mm/8" and 150 mm/6" wafers (fitted as standard).
Safety
The EMS 300T T Plus meets key industry CE standards • All electronic components are protected by covers • Implosion guard prevents user injury in event of chamber failure
• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened • Overheating protection shuts down power supply Vacuum control
Algae spore in spider web, spore size 5 μm coated with 2nm Cr followed by 1nm Au mag x 8k
188
High vacuum turbo pumping allows sputtering of a wide range of oxidizing and non-oxidizing metals for thin film and electron microscopy applications. Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.
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