EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION CALIBRATION STANDARDS & SPECIMENS  SPM Calibration Specimens (continued)


 Model 150-2D — Very High Reference and Traceable Standard for Resolution Calibration AFM, SEM, Auger, and FIB


General Purpose – High Precision


A precision, holographic pattern provides accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.


Period: 144 nm pitch, two-dimensional array. Accurate to ± 1 nm. Refer to calibration certificate for actual pitch.


Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated.


For AFM, use in contact, intermittent contact (TappingMode™) and other modes with image sizes from 250 nm to 10 mm. Available un-mounted or mounted on 12 mm steel disks.


For SEM, an independent analytical lab has tested this specimen in a FE-SEM (field emission scanning electron microscope). They found that the pattern was very uniform and the specimen was easy to image. No significant charging was observed in the voltage range 1-20 kV.


Usability: the calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans.


 MODEL 150-2D:


This Calibration Reference specimen comes with a non-traceable, manufacturer’s certificate. These states the average period, based on batch measurements.


MODEL 150-2DUTC:


This traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstald, is the German counterpart of NIST). The uncertainty of single pitch value is typically ±1,4 nm (95% confidence interval). Multi- pitch measurements provide the usual square-root of N improvement in precision.


Easy to use


We recommended Model 150-2D because of its unique characteristics which make it especially easy to use. The specimen is durable and it allows you can scan in contact mode, offering you faster calibration and measurements. This is the only high resolution 2D calibration specimen we have seen that offers the following characteristics:


 2-dimensional array for simultaneous calibration of X and Y axes.  Pitch <500 nm.


 Array of pumps mean the image contrast is high even when the probe tip is slightly dull.


 High contrast in contact mode scans.  The pattern covers the entire die so that you don’t have to hunt for the scan area.


Ordering for Calibrator only:


Available in the following ways: unmounted, 15mm steel disk(for AFM), SEM pin stub, or any other type of SEM stub. ASM Model# EMS Part# 300-1D


ASM Model# EMS Part# 150-1D


80125-1D Unmounted 80125-1D-Pin 80125-1D-AFM 80125-1D-X


(Choose mounting) 150-2D 150-2DUTC


80125-2D Unmounted 80125-2D-Pin 80125-2D-AFM 80125-2D-X


80126-2D Unmounted 80126-2D-Pin 80126-2D-AFM 80126-2D-X


300-2D


301BE 301CE


80123-1D Unmounted 80123-1D-Pin 80123-1D-AFM 80123-1D-X


80123-2D Unmounted 80123-2D-Pin 80123-2D-AFM 80123-2D-X


80111-31 Unmounted 80111-31-Pin


80110-31 Unmounted 80110-31-Pin


302CE 700-1D 700-2D 701CE 702CE


750-HD PT


ASM Model# EMS Part# 302-edu


80124-EDU Unmounted 80124-EDU-Pin


80110-32 Unmounted 80110-32-Pin


80122-1D Unmounted 80122-1D-AFM


80122-2D Unmounted 80122-2D-AFM


80110-71 Unmounted 80110-71-Pin


80110-72 Unmounted 80110-72-Pin


80124-HD Unmounted 80124-PT


99


SEM Medium Magnification


The bump height is about 90 nm. This specimen is not recommended as a height reference because it is not easy for the standard AFM probes to reach the substrate level between the pumps.


At 5 kX, the individual bumps were still well resolved. Large fields of view show how few defects are present. The most common defects are single missing bumps or a single extra bump inserted between lattice positions. Two vacancies are present in the image shown here.


20 kV 20 kV 5 kV


AFM Tapping Mode Scan


SEM High Magnification The following image was captured with a magnification setting of 100kX and accelerating voltage 10 kV


1 kV


10 kV


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