EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS300T T Plus (continued) Cool magnetron sputtering
Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it can heat the sample and result in damage when the plasma interacts with the sample. The EMS 300T T Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.
The EMS 300T T Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. The EMS 300T T Plus is fitted as standard with a chromium (Cr) sputter target. Other targets options include; Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al, etc.
Pulsed cleaning for aluminum sputtering Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove. The EMS 300T T Plus has a special recipe for Aluminum that reduces the oxide removal time and prevents excessive pre-sputtering of the target.
Film thickness monitor
The EMS 300T T Plus can be fitted with an optional film thickness monitor (FTM), which measures the coating thickness on a quartz crystal monitor within the chamber, in order to control the coating thickness of material deposited on to the sample.
SPECIFICATIONS Instrument Case
Weight
Packed Dimensions Work Chamber
Display User Interface Specimen Stage
A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard.
A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options Vacuum Rotary Pump
4 m3 Turbo Pump
Vacuum Measurement Ultimate Vacuum
Sputter Vacuum Range Processes
Sputter Deposition Current Visual Status Indicator
Triple sputtering head with automatic shutter open
Triple sputtering head with automatic shutter closed
Single target: 1 - 140mA All targets: 60 - 420mA
A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.
The indicator LED shows the following states: • Initialization • Process running • Idle
• Coating in progress • Process completed
• Process ended in fault condition Standard specimen stage
Audio indication also sounds on completion of the process. Services Gases
process gas argon, 99.999% Nominal 5 psi
/hr, two stage rotary pump with oil mist filter for the 300T T Plus Internally mounted 70L/sec air cooled
Pirani gauge as standard, full range gauge available as an option 5 x 10-5 5x10-2
mbar* to 5x10-3 mbar*
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) 36 kg (packed: 59kg)
730 mm W x 630 mm D x 690 mm H
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
rotary planetary specimen stage (option)
Specimen stage for glass microscope slides (option)
continued >>>> 189
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