EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES
EMS 150R Plus Rotary Pumped Coater
QUICK OVERVIEW
The EMS 150R Plus is suitable for use with Tungsten/LaB6 SEM and Benchtop SEM.
Typical uses
Sputter coating of noble metals using the EMS 150R S Plus & EMS 150R ES Plus
Recommended for magnifications: • Up to x 50k using Au, Au/Pd • Up to x 100k using Pt (optional)
Carbon cord coating for elemental analysis using the EMS 150R S Plus & EMS 150R ES Plus.
KEY FEATURES Capable of achieving vacuum of 2 x 10-3
mbar
New touch and swipe capacitive screen USB port for upgrades and download of log files Multiple-user profiles can be set up on one machine New software sorts recipes per user, according to recent use 16GB of memory can store more than 1000 recipes New multi-color LED visual status indicator Interchangeable stage options and plug-in heads
PRODUCT DESCRIPTION The EMS 150R Plus is available in three configurations:
• EMS 150R S Plus – An automatic sputter coater for non-oxidizing metals. Available sputtering targets including gold, gold/palladium and platinum.
• EMS 150R E Plus – An automatic carbon cord coater for SEM applications such as EDS and WDS.
• EMS 150R ES Plus – A combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.
Improved Interface • Capacitive touch screen is more sensitive for ease of use
• User interface software has been extensively revised, using a modern smartphone-style interface
• Comprehensive context-sensitive help screen
• USB interface allows easy software updates and backing up/copying of recipe files to USB stick
• Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
• 16GB of flash memory can store more than 1000 recipes • Dual-core ARM processor for a fast, responsive display
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.
Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.
System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.
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Recommended applications for EMS 150 R Plus: • Low and medium magnifications
• SE signal boost (1nm or less) • Table-top SEM coating • Elemental analysis • Copper metallization layers
These products are for Research Use Only.
Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.
Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.
Automatic, controlled pulsed carbon cord evaporation
The carbon evaporation process can be terminated using the optional film thickness monitor, which incorporates a quartz crystal monitor, fitted as standard on E and ES models. This recipe ensures that carbon is evaporated in short controlled pulses, which has two effects: protecting the sample from heating and ensuring the accuracy of the film thickness monitor. Pulsing also significantly reduces the amount of debris (including large carbon fragments) associated with traditional carbon "flash" evaporation. Pulsed and ramped carbon rod recipes are supplied as standard.
Cool Magnetron Sputtering
Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron
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