EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES EMS150GB Turbo-Pumped Sputter Coater/Carbon Coater — For Glove Box (continued) Other options, including FTM and glow discharge
• 3270 extended height chamber (87mm higher than the standard stage) For tall specimens.
• 3290 Film Thickness Monitor (FTM). Consists of a controller and quartz crystal oscillator built into the EMS150GB and a vacuum feed though, chamber mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited.
• 4513 glow discharge insert. Used to modify surface properties (eg hydrophobic to hydrophilic conversion).
ORDERING INFORMATION
EMS150GB A modular, high resolution turbomolecular-pumped sputter coater/carbon rod evaporator for glove boxes. Includes: sputtering insert, 54mm Ø x 0.3mm chromium target, carbon rod evaporation insert, carbon rods (3.05mm Ø x 300mm) and carbon rod shaper (manual operation). Fitted with a rotation stage
Rotary pump requirements (needs to be ordered separately) 91003
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter
6550
Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter
Options and accessories 3230 3240
Carbon rod evaporation head insert (for 3.05mm Ø rods
Carbon rod evaporation head insert (for 6.15mm Ø rods).
Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical 3250 3260
Carbon fiber evaporation head insert Metal evaporation and aperture cleaning head insert,
including the ability to evaporate upwards or downwards. Supplied with a pack of ten tungsten filaments and a molybdenum boat.
3270 3290
Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens
Film thickness monitor (FTM) attachment.
3300 3320
4513
3600 3630
Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited Spare quartz crystal.
Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)
Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues
Metal evaporation basket - pack of 10 (for use with metal evaporation head) Two-year spares kit for EMS150GB
Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings
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Specimen stages 6790-S
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6800-S 6801
Swinging arm stage drive,
a stage drive and positioning mechanism which positions the stage under the correct target. Also provides rotation drive to the stage. Rotation Speed Max 38 rpm Min 14 rpm
Rotating specimen stage for 6" (152 mm) wafers, with rotation variable between preset limits.
Rotating 50 mm Ø specimen stage with adjustable tilt.
The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8" pin stubs.
6802
The stage rotation speed is variable between preset limits. The target to stage height is variable between 0 mm and 42 mm for the standard stage. When used with the extended height cylinder the target to stage height would be an additional 87 mm. 50 mm Ø variable height specimen stage
with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Stage rotation speed variable between preset limits.
Note: Target to stage height is variable between 10 mm and 53 mm for the standard stage. The stage is supplied with two mounting pillars; one provides 10 mm to 32 mm target to stage distance and the other 31 mm to 53 mm. An adjustable stop is used to set the height. When used with the extended height cylinder (optional accessory) the target to stage height would be an additional 87 mm. 6803
50 mm Ø rotary tilting stage.
A rotary planetary style stage with a variable tilt angle from horizontal to 30 degrees. The platform has six positions for either 6.5 mm, 10 mm and 15 mm disc stubs or 1/8" pin stubs. Rotation speed is variable between preset limits.
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187
Note: depending upon specimen height, this stage may require the optional extended height cylinder. 6804
A 90 mm Ø specimen stage for glass
microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six 1/8" SEM pin stubs. The stage rotation speed is variable between preset limits. A gear box is included to allow the optional FTM to be used.
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each Glow discharge attachment option
During sputtering, optional film thickness monitor (FTM) shown
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