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EMS MATERIALS SCIENCE & METROLOGY CATALOG 2019–20 EDITION EQUIPMENT & ACCESSORIES Please see the following pages for our latest


High-End Vacuum Equipment and Accessories for Materials Science


Cooling Stages....................................................164–165 The EMS Coolstage for SEM, LV or VP..................................164–165


Recirculating Heaters and Chillers...............166–167 EMS 3500 Thermocirculator...............................................166


EMS 4800 Recirculating Heater/Chillers .............................167


Glow Discharge and Sputter Coaters/ SEM/TEM Carbon Coaters............................168–187


EMS GloQube™ Glow Discharge System for TEM and Surface Modification ..............................168–169 EMS 7620 “Mini” Sputter Coater/Glow Discharge ......170–171 EMS 7620-CF Carbon Accessory Power Supplies...............171 EMS 150V Plus Automatic Coater...............................172–175 EMS 150R Plus Rotary Pumped Coater ......................176–179 EMS 150T Plus Turbomolecular Pumped Coater ........180–183


EMS150GB Turbo-Pumped Sputter Coater/ Carbon Coater — For Glove Box ................................184–187


Vacuum Evaporators


(Large Chamber)................................................188–195 EMS 300T T Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater....................................188–190


EMS 300T D Plus Dual Target Sequential Sputtering System......................................................191–193


EMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semiconductor Wafer Coating..........194–195


RF Plasma Etchers/Plasma Reactors............196–197 EMS 1050 Plasma Asher............................................196–197


Cryo-SEM Preparation Systems ...................198–201


PP3010T Cryo-SEM/Cryo-FIB/SEM Preparation System....................................................198–201


Specimen Transfer Systems..........................202–206 PP3004 QuickLok.......................................................202, 206


PP3005 SEMCool .......................................................203, 206 PP3006 CoolLok .........................................................204-206


Coaters and Coater Targets Replacement Parts


EMS 450 Carbon Coater


The EMS 400 and 450 Carbon coaters have been replaced by the EMS 150R E Plus.


Parts and accessories for the EMS 450 are listed below.


Carbon 91045


91046 91014


Carbon String, 1 meter Carbon Cord, 1 meter


Replacement Parts 91013


Glass Cylinder 165mm (6")


"L" Gaskets to suit 165mm (6") cylinder EMS 450, 500, 550


meter meter


EMS 450, 500, 550 1 pair


EMS 500, 550, 575, 650 and 675 Sputter Coaters and EMS 975 and 975S Large Chamber Turbo Evaporator EMS is pleased to offer the 150 and 300 series sputter coater and combined carbon and sputter coater.


 EMS150R ES Plus – a combined system with sputtering and carbon fibre coating replaces the EMS 500 and 550.


 EMS 150T S Plus replaces the EMS 575X  EMS 300T D Plus replaces the EMS 575XD


 EMS 300R T Plus and EMS 300T T Plus replace the EMS 600, EMS 650, and the EMS 675X


Parts and accessories for the EMS 575, 650, 675 and 975 are listed below.


Accessories 92045


EMS 50 Water Chiller Replacement Targets


EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.


91010 91011 91012 91013 91014 91030 91031 91032 91013 91014


Gold Target


Gold/Palladium Target EMS 500, 550, 575T each Platinum Target Chromium Target Tungsten Target Gold Targets*


EMS 500, 550, 575T each EMS 500, 550, 575T each


EMS 575T EMS 575T


Gold/Palladium Targets* EMS 650, 675X Platinum Targets* Chromium Targets* Tungsten Targets*


EMS 650, 675X EMS 650, 675X


EMS 675X EMS 675X


(*Recommended change as set of three)


Replacement Parts 91033


91034


Glass Cylinder 225mm (8")


Replacement Source 91077


EMS 650, 675X, 975, 975S


"L" Gaskets to suit 225mm (8") cylinder EMS 650, 675X, 975, 975S


Carbon Rods (6.15mm Dia.),


EMS 975, 975S 12/pack 1 pair


each each x3 x3 x3 x3 x3


Algae spore trapped in spider silk coated with 5nm Au x 11k magnification 162


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