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Precision Vibration Isolation in the Cleanroom


When used in cleanroom environ- ments (Class 10,000 and lower), the supply and exhaust gases need to be vented and piped out of the controlled areas, to ensure the gases will not contaminate the cleanroom environ- ment. The air compressor, located out- side of the cleanroom, is itself a source of low-hertz mechanical vibration. Negative-stiffness isolators em-


ploy a completely mechanical con- cept, with no air or electricity re- quired. There are no motors, pumps or chambers, and no maintenance be- cause there is nothing to wear out. They operate purely in a passive me- chanical mode. Vertical-motion isolation is pro-


vided by a stiff spring that supports a weight load, combined with a nega- tive-stiffness mechanism. The net vertical stiffness is made very low without affecting the static load-sup- porting capability of the spring. Beam-columns connected in series with the vertical-motion isolator pro- vide horizontal-motion isolation. A beam-column behaves as a spring combined with a negative-stiffness mechanism. If sensitive instrumentation in


the cleanroom can be isolated from vibrations without having to deal with compressed air or electricity, then it makes for a system that is simpler to install, easier to set-up, and more reliable to operate and maintain over the long-term.


Location Flexibility. Air tables are big and bulky, making them a tougher fit for the precious laborato- ry and production space require- ments of cleanrooms. By contrast, negative-stiffness systems can be made to be compact, taking up very little space. Instrumentation can be positioned or moved around a facility without having to worry about feed- through for electrical power and air hoses. Large negative-stiffness work- stations are also available when large working spaces are required. Because of their very high isola-


tion efficiencies, negative-stiffness vi- bration isolation systems enable sen- sitive instruments —such as scanning probe microscopes, laser-based inter- ferometers, optical profilers and scan- ning electron microscopes — to be lo- cated wherever a cleanroom needs to be set up, whether that be in a base- ment or on a building’s sixth floor. Ex- treme vibration-sensitive environ- ments would not be practical locations for pneumatic isolation systems. As vibration-handicapped envi-


ronments become more prevalent for the placement of cleanrooms, a better vibration isolation solution will be re- quired than what has been available for the past half-century with air ta- bles. Negative-stiffness vibration iso- lation is filling this void. Contact: Minus K Technology,


Inc., 460 Hindry Avenue, Unit C, In- glewood, CA 90301 % 310-348-9656 fax: 310-348-9638 E-mail: sales@mi- nusk.com Web: www.minusk.com r


See at APEX, Booth 3400


www.us- tech.com


Akrometrix Intros Next-Gen Shadow Moiré System


Atlanta, GA — Akrometrix has intro- duced its next-generation shadow moiré system, the AXP 2.0. The sys- tem provides warpage metrology with state-of-the-art lateral, top and bottom temperature uniformity. The AXP 2.0 not only provides thermal warpage metrology, but has optional modules for both DIC strain and CTE measure- ments, along with DFP for discontinu- ous surfaces. Using a combination of both top and bottom heaters with shadow moiré, the system provides temperature uniformity on a flexible and configurable platform.


Akrometrix provides thermal


warpage and strain metrology for the front-end and back-end wafer, back- end packaging and assembly, panel


and the PCB and component mar- kets. The company provides both capital equipment and test services to measure warpage and strain in temperatures from –50 to +300°C (–58 to +572°F) on almost any sub- strate up to 600 x 600 mm (23.6 x 23.6 in.), regardless of shape. Contact: Akrometrix LLC, 2700


Northeast Expressway NE, Building B, Suite 500, Atlanta, GA 30345 % 404-486-0880 E-mail: emoen@akrometrix.com Web: www.akrometrix.com


AXP 2.0 shadow moiré system. See at IPC APEX, Booth 704


Page 47


LED Big Board Solution


Production class assembly equipment for 24”, 28”, 48”, 59” PCB form factors includes high performance printing, precision component mounting, repeatable reflow, and reliable board handling with expert training, service and support.


Visit us at booth 3400


smt.hanwhatechwin.com


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