Equipment and Materials ♦ news digest
This innovative debonder was purchased by an industry leader in the production of high-powered radio frequency (RF) components for use in wireless communications.
The Cee 1300CSX thermal debonder enables high- temperature slide-off debonding of thinned silicon and compound semiconductor substrates from a rigid carrier to allow further processing of delicate thinned wafers.
mode, excess force sensing and data logging.
Aixtron celebrates thirty years
Aixtron has sold around 3,000 deposition systems worldwide and believes optoelectronics is the way forward
Cee 1300CSX thermal slide debonder
This debonding can be performed in a confidential laboratory setting without interrupting high-volume track production time and without investing large amounts of capital in additional automation.
“This commercial launch marks another strategic milestone in reducing the customer’s cost of ownership for thin-wafer handling through Brewer Science’s industry-leading equipment, temporary bonding materials, and process integration,” says Justin Furse, Brewer Science Equipment Technology Strategist.
The Brewer Science Cee 1300CSX thermal debonder is claimed to deliver exceptional accuracy, interface capabilities, and process flexibility. The debonder enables precise control of the process temperature for thermally sensitive substrate materials. Customers can accelerate time to market of their new ultrathin wafer technologies with the enhanced Cee 1300CSX thermal debonder.
Significant improvements have been engineered into the new Cee 1300CSX debonder design.
In a compact footprint, the tool has precise lower platen z-position control and programmable electronic lift pins for loading and unloading. and substrate sizes can be varied. The Cee 1300 CSX also has a constant force
Aixtron is rejoicing after thirty years in the semiconductor equipment manufacturing business.
What started as a spin-off at RWTH Aachen University is now a publicly listed provider of deposition systems that has played a key role in shaping microelectronic and optoelectronic production technologies. Some of the world’s largest manufacturers purchase the products offered by the German high-tech player Aixtron for the production of LEDs, lasers, transistors and solar cells.
“Optoelectronics is the way ahead,” says Holger Jürgensen, physicist and now Honorary Chairman of Aixtron’s Supervisory Board described his vision. He put this into practice by founding Aixtron together with Meino Heyen and Heinrich Schumann in December 1983.
“One major event was the delivery of the first commercial Planetary Reactor system in 1990 - a milestone in the development of reliable, scalable deposition systems for semiconductors,” comments Jürgensen looking back.
Since the first research system supplied by Aixtron to AEG in Ulm in 1984, the company has sold around 3,000 deposition systems worldwide, benefiting in the process from demand for ever smaller, faster and more cost- effective components.
Revolution in light technology: LED replace light bulbs The idea of developing gas-phase deposition materials
January / February 2014
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