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Page 52


www.us- tech.com


February, 2020 Single-Module X/Y Precision


Linear Stage Family from PI Auburn, MA — In addition to its pop- ular air bearing x/y stages, a series of integrated x/y stages with mechani- cal bearings is now being offered from PI (Physik Instru- mente). These integrated x/y stages are engineered for higher loads and are available with three-phase linear direct-drive motors for higher speed and ball screws for higher push/pull forces, respectively. Available with nano -


 





www.fkdelvotec.com 949-595-2200


meter resolution linear en- coders, these x/y stages are well-suited for applications in biotechnology, industrial automation, laser process- ing, and flat panel display testing and manufacturing. The integrated me-


chanical design allows for a lower profile and improved geometric performance, when com- pared to modular x/y-stage assem- blies of two single-axis translation stages bolted together. Due to the im- proved support, planar x/y tables are stiffer and flex less compared to x/y combinations of single-axis linear stages, especially when the individ- ual axes are moved to their extreme positions. The ball screw variants, L-731,


L-738 and L-741, can be powered by stepper motors and servo motors, re- spectively. The direct-drive, linear- motor variants, V-731, V-738 and V- 741, are driven by an ironless three- phase motor for cogging-free, ultra-


Single-module x/y linear stages.


three-stage families provide sensor resolution from 0.1 to 0.001 µm, with mechanical position repeatability to 0.05 µm. For even higher accuracy and


motion performance, air bearing x/y stages, such as the A-311 and A-322


PIGlide models are recommended. Contact: PI (Physik Instru-


mente) L.P., 16 Albert Street, Auburn, MA 01501 % 508-832-3456 fax: 508-832-0506 E-mail: info@pi-usa.us Web: www.pi-usa.us


See at ATX/MD&M West, Booth 334 and at SPIE


Photonics West, Booth 4857


smooth motion, for the highest de- mands for precision. Ironless motors allow smoother, vibration-free run- ning over a wide velocity range. Both


508.553.0529 | 800.554.9994 www.jnj-industries.com sales@jnj-industries.com


See at IPC APEX, Booth 924


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