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www.us-
tech.com Partner with an Expert to Ensure Wet Process Cleaning Equipment Success By Del Williams F
or semiconductor manufacturers, compound semiconductor manufacturers, raw wafer material suppliers, and R&D labs, utilizing
wet process cleaning equipment is key to produc- ing extremely reliable products. Partnering with a vendor with deep expertise in all aspects of the process — from equipment selection, design speci- fication, testing, and installation/hook up — can be critical to success. In such fabrication, “cleaning” refers to the
etching process used, which precisely removes thin layers of material. In other applications, cleaning can also refer to the use of agents, such as solvents, acids or bases, to remove unwanted particulates and other contaminants, including photoresist. The cleaning process may involve moving
product into extremely hot chemical baths of acids, bases, or flammable solvent. Consulting with an expert can improve safety and ergonomics. It often requires selecting the most appropriate options from a number of technologies. This may involve various chemistries, temperature controls, chemi- cal baths/dips, and ergonomic designs, as well as cleaning, filtration, ventilation, safety, and dispos- al technologies. It may also involve automating/up- grading the cleaning process for high-volume pro- duction. If the process takes place in a cleanroom, then the entire system including motors and robot- ics must be appropriate for that environment. Hitting any snag can cause quality or safety
issues, delay production, or even cost millions if the equipment must be prematurely replaced to ac- commodate automation. To avoid these snags, it can be invaluable to partner with an equipment manufacturer with industry expertise that can help to optimize the entire product lifecycle from start to finish.
C 4:53 PM Page 1
Planning for the Smallest Details While all aspects of wet process cleaning are
important to consider, failing to plan for even the smallest details of cleaning equipment can lead to challenges. These include not complying with the local fire or building codes or even being able to get equipment through doors, hallways or elevators into a cleanroom. One area that is often overlooked but can be
essential to consider is “facilitization,” which refers to the installation, hook up (supplying deionized
tails can cause serious problems that can compro- mise production and require retrofitting,” says Louise Bertagnolli, president of JST Manufactur- ing, which designs and manufactures manual and automated cleaning equipment, including propri- etary systems with all the features and transfer devices needed for a complete turnkey cleaning process. As an example, Bertagnolli points to a variety
of logistics that must be properly implemented. This can include, for instance, getting the product and chemistries in and out of the tool, and getting the tool into the cleanroom and set up, as well as meeting safety and exhaust system requirements. “Because the cleaning equipment can be rela-
tively large, even the size of elevators, doors and hallways must be checked to ensure it fits,” she says. “Failing this, one manufacturer had to have a crane lift the equipment through a sixth-story window.” So, to prevent mistakes and ensure that wet
Wet processing applications lab.
water, chemistries, drain lines, exhaust system, etc.) and safety compliance. Facilitization is a major cost when considering new production equipment and changes in the equipment design to accommodate existing facility constraints can re- duce this cost. “The ‘facilitization’ process needs to be thought through, because missing important de-
process cleaning equipment is designed, installed and “facilitizized” in complete compliance with all safety and performance requirements, it is impor- tant for the manufacturer to work with an equip- ment manufacturer with the expertise to provide one-stop guidance. Getting needed expertise up front ensures that the wet process cleaning equip- ment will perform as required, with no unwelcome surprises.
Facilitization Specifying for safety and compliance is criti-
cal and many aspects need to be sorted through to ensure the tool is designed to be integrated with the semiconductor manufacturing plant.
Continued on next page
February, 2020
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