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news digest ♦ LEDs


DianMing Deng, President Changelight and Bastian Marheineke, Vice President Sales, Aixtron SE


“The vast majority of systems we sold in 2010, almost 95%, are used for the manufacture of LEDs. In the first quarter of 2011, around 90% of Aixtrons revenues were generated by sales into Asia; almost 90% of systems sold are for the manufacture of LEDs. China will undoubtedly be our biggest market in 2011,” concludes Marheineke.


DianMing Deng, President Changelight, adds, “We feel deeply honoured that Aixtron supplied its 2,000th system to Changelight. Development from our initial private enterprise to the present listed company is inseparable from the great support we have enjoyed from the Aixtron team since our foundation in February 2006. With Aixtron, a leading provider of deposition equipment in the semiconductor industry, we have had an intensive relationship and cooperation over the past five years. Today, our manufacturing facilities are based exclusively on Aixtron MOCVD equipment which has been pivotal in our becoming the biggest supplier of high-quality AlGaInP Red Orange Yellow (ROY) HB LED chips in China.”


“The new systems form part of our future expansion plans in Yangzhou which was opened in April 2010. Looking to the future, I see our strategic cooperation partnership with Aixtron will become deeper and broader. We send our best wishes for the company´s further success – hopefully with the delivery of the 3000th and 4000th MOCVD system in China, too.”


The 2,000th system is part of a multiple tool order for 60x2-inch AIX 2800G4-R systems for advanced optoelectronics devices and will be installed and commissioned by the local Aixtron service team at the Changelight production facilities.


SPTS and Australia’s Griffith University to develop SiC-on- silicon technology


The three-year collaboration aims to commercialise SiC-on-silicon as a viable semiconductor material for LED, power and MEMS devices.


60 www.compoundsemiconductor.net October 2011


SPP Process Technology Systems (SPTS), a manufacturer of plasma etch and deposition, and thermal processing equipment for the semiconductor and related industries, and Griffith University in Australia have signed a joint development agreement (JDA) targeting the commercialisation of SiC-on-silicon technology. SiC-on-silicon substrates have a wide variety of applications for the rapidly growing LED, micro- electro-mechanical systems (MEMS) and power markets.


SiC is an important substrate for growing the GaN films used to manufacture LEDs. The increased radiation hardness, mechanical strength and thermal properties of SiC also make it a suitable replacement for silicon in MEMS devices for harsh environments. In addition, SiC is used to create semiconductor devices for high power, high frequency applications where the electrical properties of SiC are significantly superior to common silicon.


Technology created by the research team at Queensland Microtechnology Facility (QMF) at the Griffith University’s Queensland Micro- and Nanotechnology Centre (QMNC), has demonstrated the ability to grow crystalline SiC directly onto low cost silicon wafers. Through the JDA, SPTS will develop the thermal process and equipment expertise necessary to commercialise the technology.


Three key technologies required for SiC-on-silicon devices are SiC deposition, etch and oxidation. The QMNC has commercially orientated research into all these areas. “The JDA enables transfer of this SiC deposition process technology to device research and development activities, and provides a bridge to volume production through batch processing for up to 300mm diameter Si wafers. SPTS’s strength in thermal processing makes them an attractive partner,” said Alan Iacopi, Operations Director of QMNC. “This JDA is an important step in the commercialization of our SiC research efforts, especially with a partner with the global reach of SPTS” agreed Sima Dimitrijev, Project Leader and Deputy Director of QMNC.


“As a market leader in providing capital equipment to the MEMS, LED and Power markets, SPTS is constantly looking at cutting-edge development opportunities. We are very pleased to have this


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