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news digest ♦ Equipment and Materials


results of collaborations and how partners can truly benefit from this.


Presentations on processing and servicing of Oxford Instruments’ equipment will give support to users, and a practical insight into Oxford Instruments and the extensive etch, deposition and growth equipment and process solutions offered.


Venue: Mountbatten Building, University of Southampton, UK


Programme: Initiating and funding successful partnerships


UK Academic/Industrial partnerships - a model for success


Understanding public funding sources First results of a successful partnership: Materials and etchers for nanowire biosensors Oxford Instruments/Southampton University collaboration success


Results of successful partnerships


Plasma source & Ion Beam technologies Developing plasma etch processes How to get the most from your tool (CS) ALD and technical achievements/working in a successful partnership Cleanroom tour & Networking Tea


Speakers include specialists in their fields:


From the University of Southampton, speakers include:


Don Spalinger, Director, Corporate Relationships Myrddin Jones, Lead Technologist; Electronics, Photonics & Electrical Systems, Technology Strategy Board


Peter Ashburn, ECS


From Oxford Instruments Plasma Technology, speakers include:


Frazer Anderson, Business Development Director Mike Cooke, CTO Bob Gunn, Applications team leader Nick Curtis, Training Officer Chris Hodson, ALD Product Manager


196 www.compoundsemiconductor.net October 2011


There is no charge for this event however booking is essential


To book or for further information please email: plasma@oxinst.com


14 July 2011: New Frontiers in Plasma Nanopatterning


Hosted by Molecular Foundry, LBNL, CA, USA and Oxford Instruments


Venue: LawrenceBerkeley National Laboratory, Berkeley, CA, USA


Timing: Thursday 14th July: 9:00am - 5:00pm


(Seminar takes place the same week as Semicon West in SF, enabling delegates to attend Semicon prior to the Seminar)


Invited Speakers include: Steve Shannon, NCSU


Friedrich Prinz, Stanford University Deirdre Olynick, LBNL Paul Ashby / Dominik Ziegler, Molecular Foundry LBNL Owain Thomas & Leslie Lea, Oxford Instruments


Topics include talks on:


Energy conservation at the Nanoscale Fabrication of high performance cantilevers in aqueous solution


Radio frequency heating for Nanoscale etching Plasma etching/deposition tools and applications


Tours of the Molecular Foundry will be available on Wed 13th (3-5pm) or Thurs 15th (9-11am) and booking will be essential.


Process Helpdesk -Oxford Instruments process experts will be on hand to answer any specific Process Application questions


Space is limited, so early booking is advisable. 18 October 2011: Nanoscale Plasma Processing Being held at CEA-LETI, Grenoble, France This one day event will cover many aspects of


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