Equipment and Materials ♦ news digest


VLSIresearch rates Plasma- Therm as one of the best for 13th consecutive year


The equipment manufacturer has been honoured for its chip making and wafer processing prowess, much of it used in the compound semiconductor industry


Plasma-Therm, a global supplier of plasma process equipment, was voted by VLSIresearch’s 2012 “Customer Satisfaction Survey” as one of the world’s best semiconductor equipment suppliers. This distinction is given to the top performers in this semiconductor segment and is based on being voted one of “10 BEST Focused Suppliers of Chip Making Equipment” and one of “THE BEST Small Suppliers of Wafer Processing Equipment”. Plasma-Therm also came top in the “Etch & Clean Equipment” category.


According to the recent VLSIresearch survey, which considers customer satisfaction in the semiconductor equipment sector, “Plasma-Therm moved up five slots to the third position with a rating of 8.18. Customers applauded this etch & clean supplier as the highest in commitment of all Focused Suppliers as well as tying in spares support.” “We are pleased that our continuous efforts and dedication to customer satisfaction and equipment performance are recognised in this prestigious survey by those that are most important – our customers,” comments Rich Gauldin, Director of Customer Focus at Plasma-Therm. He continues, “Every year we strive to improve our ratings and being acknowledged each of the last 13 years as being among the very best semiconductor equipment providers is motivating.”


New suite of GaN LED MOCVD tools revealed by Veeco


The three new reactors, suited to the growth of gallium nitride based LEDs, come in 2, 4, 6 and 8” wafer configurations


Veeco Instruments has introduced three new models of its TurboDisc MOCVD systems for the production of high brightness LEDs.


These are the TurboDisc MaxBright M, TurboDisc MaxBright MHP and TurboDisc K465i HP.


MaxBright MHP reactor


The MaxBright M is a modular and more compact version of Veeco’s multi-reactor system. It is claimed to provide easier serviceability and up to 15% improved footprint efficiency compared to Veeco’s MaxBright tool. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.


The MaxBright MHP, is a high performance version of the new modular “.” described above. Veeco says this model provides as much as 20% within- wafer wavelength uniformity improvement over the MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MaxBright MHP also provides lower cost of ownership as compared to MaxBright.


The final reactor is the K465i HP, which a high performance option for Veeco’s single-reactor MOCVD system . It apparently delivers up to 20% within-wafer wavelength uniformity improvement compared to the K465i and a lower cost of ownership.


These new systems are available in 2, 4, 6 and 8” configurations.


Veeco says existing MaxBright and K465i July 2012 www.compoundsemiconductor.net 179


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