news digest ♦ Equipment and Materials


Rotary sputtering targets for CIGS materialise


MOCVD is still a key factor in reducing manufacturing costs.


With close to 100 companies involved in front end LED manufacturing, the industry is too fragmented to generate significant economies of scale. Yole expects massive consolidation within the next 3 years (2012-2015) which should eventually speed up process and tool standardisation and allow economy of scale.


LED manufacturing still uses methods that would be considered outdated in most semiconductor industries. Consolidation and emergence of LED “giants” will also facilitate and speed up adoption of manufacturing paradigms coming from the IC industry.


Adoption of silicon substrates for LED manufacturing could speed up those trends by rapidly moving LED epiwafer processing into existing, highly automated and fully depreciated CMOS fabs. This would also give LED makers access to extended “process toolboxes” which could pave the way for entirely new LED structures.


New targets incorporating copper, gallium and if wanted, indium, for solar cell manufacturing have just come on the market


Indium Corporation will feature its enhanced copper-indium-gallium (CuInGa) and copper-gallium (CuGa) rotary sputtering targets at Intersolar North America.


The conference is taking place between July 10th and 12th, 2012 in San Francisco, California, USA.


The targets are now available in lengths up to 3.2 metres, and with the thicknesses of the monolithic source layer up to 22 millimetres.


The targets are made by Indium Corporation’s vertically integrated proprietary process utilising aerospace powder metallurgy technology. The production process output produces a consistently homogeneous alloy with low ppm (parts per million) contamination levels and uniform density throughout the target, resulting in very consistent sputtering film properties.


The CuInGa ternary alloy targets and CuGa targets can be produced in chemistry ranges standard to the CIGS industry, and unique chemistries for the R&D and engineering community. Both are produced as a monolithic material, bonded onto the backing tube during Indium Corporation’s unique hybrid consolidation process.


168 www.compoundsemiconductor.net July 2012


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