LEDs ♦ news digest
The MaxBright M is a modular and more compact version of Veeco’s multi-reactor system. It is claimed to provide easier serviceability and up to 15% improved footprint efficiency compared to Veeco’s MaxBright tool. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.
The MaxBright MHP, is a high performance version of the new modular “.” described above. Veeco says this model provides as much as 20% within- wafer wavelength uniformity improvement over the MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MaxBright MHP also provides lower cost of ownership as compared to MaxBright.
The final reactor is the K465i HP, which a high performance option for Veeco’s single-reactor MOCVD system . It apparently delivers up to 20% within-wafer wavelength uniformity improvement compared to the K465i and a lower cost of ownership.
These new systems are available in 2, 4, 6 and 8” configurations.
Veeco says existing MaxBright and K465i systems are easily field-upgradeable to the high performance HP option. All of Veeco’s MOCVD systems feature its TurboDisc technology, which enable very good throughput.
William J. Miller, Ph.D., Executive Vice President, Veeco Process Equipment, comments, “This new suite of products provides our customers with tremendous flexibility to make the most of their capital investments and choose the system that works best in their unique production environment. The innovation in the MaxBright M, MaxBright MHP and K465i HP was accomplished by listening to our customers and focusing on system improvements that could drive their productivity and yield – two critical factors in our customers’ success.”
John R. Peeler, Chairman and Chief Executive Officer of Veeco adds, “This new product line- up, all based on our industry leading technology and automation expertise, can help to accelerate worldwide adoption of LED lighting by reducing manufacturing costs. Veeco remains committed to providing the industry’s highest capacity, highest
throughput and lowest cost of ownership MOCVD systems available.”
According to IMS Research, the K465i, introduced in 2010, was the top selling MOCVD tool that year, and the MaxBright, launched in 2011, was the top seller last year.
Earlier this year, Compound Semiconductor Magazine awarded Veeco the “Compound Semiconductor Manufacturing Award, stating “MaxBright was the biggest breakthrough in compound semiconductor manufacturing over the last 12 months.”
China’s Sinoepi to enhance nitride LED production with Aixtron system
The company, which specialises in indium gallium nitride wafer and chip manufacturing, has ordered a 69 x 2-inch CCS reactor from the MOCVD equipment specialist
Aixtron SE has a new customer in Sinoepi, a manufacturer of epitaxial wafers and chips used for LEDS.
The Chinese firm has placed an order for one MOCVD system, a CRIUS II-L reactor in a 69 x 2-inch wafer configuration. The system will be used for the production of epitaxial wafers for ultra-high brightness (UHB) GaN based LEDs.
The reactor was ordered in the fourth quarter of 2011 and was delivered during the second quarter of 2012. Aixtron´s local service support team will install and commission the CRIUS II-L at the Sinoepi production complex located in Beijing.
“Although this is our first new piece of equipment from Aixtron, my team is already very familiar with CRIUS technology,” says Ye, General Manager of Sinoepi.
“We are particularly impressed with its high performance-to-cost ratio compared to other systems, as well as the seamless and short process transfer. CCS technology is well established around the world due to its outstanding reputation
July 2012
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