May, 2017
www.us-tech.com e Versum Offers Bulk Chemical Delivery System
Tempe, AZ — Versum Ma- terials recently introduced its CHEMGUARD Gen III high-purity liquid delivery system for high-volume semiconductor fabrication. The systems are single- reservoir bulk chemical de- livery cabinets for fabwide chemical distribution, de- signed to enable 100 per- cent tool uptime. Class 1, Division II-
compliant, the liquid deliv- ery systems handle harsh chemistries in difficult en- vironments. The company has in-
stalled 200 units since the system’s launch. The CHEM - GUARD product fam ily was introduced in 1999 under the
CHEMGUARD
Gen III chemical delivery system.
Schumacher brand. Capitalizing on its ma-
terials and delivery systems experience, the company re- cently created a multi-disci- plinary team that reviews new molecules as they ramp and gain market acceptance. The team evaluates chemi- cal safety and process needs and helps speed time-to- market for new molecules and processes by working to create delivery solutions that are ready for technology ramps.
Contact: Versum Mate-
rials US, LLC, 8555 South River Parkway, Tempe, AZ 85284 % 800-837-2724 Web:
www.versummateri-
als.com
USI Releases Large Format Coating System
Haverhill, MA —Ultrasonic Systems, Inc. (USI) has released its Prism 800 coating system. The Prism 800 uses the company’s proprietary, nozzle- less ultrasonic spray head technology for the thin, uniform application of a variety of coatings, including pho- toresists, EMI shield coatings, fuel cell catalysts and other speciality coatings. These coatings are widely used in the semiconductor packag- ing, fuel cell, display, and medical in- dustries.
Designed to meet high through- put production requirements, the
Prism 800 contains a high-speed, fully-programmable x/y/z gantry with a large usable spray area of up to 780 x 780 mm (30.7 x 30.7 in.). Nu- merous options are available to in- crease production capacity, including tandem coating heads, two independ- ent liquid delivery systems, dual sub- strate lift stations, and a robot load
lift/shuttle station. Contact: Ultrasonic Systems,
Inc., 125 Ward Hill Avenue, Haver- hill, MA 01835 % 978-521-0095 E-mail:
sales@ultraspray.com Web:
www.ultraspray.com
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12:33 PM Page 1
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