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VAPORSTATION™ III Central Delivery System
The VAPORSTATION™ III Central Delivery System offered by Dow Electronic Materials is designed to deliver metal-organic precursors to multiple CVD reactors from a central supply source cabinet using a high-purity carrier gas.
The system uses an on-board evaporator to convert liquid precursors supplied from a bulk source canister into a vapour phase and is capable of tightly controlling the flow rate of material to the connected CVD reactors. The VAPORSTATION III Central Delivery System is controlled through a touch screen interface providing users with easy operation of automatic and manual modes for set-up safety maintenance and evaporator controls.
This delivery technology enables users to run several reactors with no downtime for precursor cylinder change which provides significant opportunity for increased reactor throughput and lower cost of ownership. Because the system eliminates the need for cylinders at each reactor the footprint for each reactor and the number of components requiring maintenance are both reduced.
Elimination of on-board precursor delivery allows for more consistent process control across multiple reactors and utilising a bulk supply approach maximises the supply of precursor material available for longer production runs. The tool also provides greater process safety in production areas as a result of less material handling and the ability to segregate the precursor
supply cabinet from the processing area. As a result, precursors would be plumbed into the processing area for delivery in a vapour form (metal-organic precursors in vapour phase are significantly less hazardous than precursors in liquid phase).
The VAPORSTATION III Central Delivery System is targeted specifically for bulk delivery of MOCVD precursors used in the epitaxial growth process for compound semiconductor devices such as LEDs lasers solar cells and optoelectronic devices. With more than three decades of experience Dow Electronic Materials is the world’s leading supplier of MOCVD precursors for the LED industry.
What industry challenge does this address? The primary challenge addressed by the VAPORSTATION III Central Delivery System is the effort and cost associated with managing small-volume MOCVD precursor cylinders through logistics and in epi processing areas. Reactors configured with on-board cylinders are shut down when the precursor source is depleted and the cylinder is changed out. The constant movement of new and depleted cylinders is inefficient and expensive. There are a number of other challenges that the VAPORSTATION III Central Delivery System addresses including the difficulty and complexity of matching process parameters between reactors as well as maximizing the reactor throughput when using on-board precursor delivery.
How does it solve the problem? By utilising a single bulk cylinder, up to 37 kg to supply multiple CVD reactors, the VAPORSTATION™ III Central Delivery System eliminates the logistics necessary to manage full and depleted cylinders for each reactor. In addition, the capacity of the evaporator is large enough to allow for bulk cylinder change-out with uninterrupted supply of precursors to the reactors which allows for users to maximise reactor throughput.
The design of the VAPORSTATION Central Delivery System controls enables consistency in material supply to each of the reactors in the production loop. The system allows for precise control of the precursor in vapour phase in a manner not possible with on-board cylinders which contributes directly to better device quality and reduced binning.
The EPC9102 is an isolated DC/DC 1/8TH brick converter. The design is a 36 V – 60 V input to 12 V output 375 kHz phase-shifted full bridge with 17 A maximum output current. The EPC9102 features the 100 V EPC2001 eGaN FETs in conjunction with the LM5113 100V half-bridge gate driver from Texas Instruments. The EPC9102 demonstrates that a new benchmark in performance can be achieved by using high switching frequency eGaN FETs
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www.compoundsemiconductor.net January / February 2013
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