EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER TARGETS
EMS precious metal sputtering targets are made from high purity metals, starting 99.99% with most standard disc sizes, for use on most sputtering units from many manufacturers: Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences, Technics Hummers, Denton, Cressington, and much more.
Our targets come in a standard thickness of 0.1 mm (100µm). Other thickness, ranging from 0.05 to 6 mm, are available upon request. Targets are available mounted or unmounted whichever you prefer. For mounting please always state the make and the model of the sputtering unit so we can tend to it for you. Targets in other materials such as Chromium, Iridium etc. are available upon request. We also can manufacture targets with diameters from 4 mm to 304.8 mm (12"). Call for pricing.
Ordering Information:
EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.
Target
Diameter, mm 20.0 20.4 32.0 39.0 42.0 50.0 50.8 54.0 57.0 60.0 63.5 75.0 76.0
Gold (Au)
91006-Au 91007-Au 91008-Au 91009-Au 91013-Au 91014-Au 91015-Au 91016-Au 91017-Au 91010
91018-Au 91019-Au 91020-Au
91030-Au 91031-Au 91032-Au 91033-Au
Platinum (Pt)
91006-Pt 91007-Pt 91008-Pt 91009-Pt 91013-Pt 91014-Pt 91015-Pt 91016-Pt 91017-Pt 91012
91018-Pt 91019-Pt 91020-Pt
91030-Pt 91031-Pt 91032-Pt 91033-Pt
Palladium (Pd)
91006-Pd 91007-Pd 91008-Pd 91009-Pd 91013-Pd 91014-Pd 91015-Pd 91016-Pd 91017-Pd 91010-Pd 91018-Pd 91019-Pd 91020-Pd
Annular Targets (Outside Diameter x Inside Diameter, mm) 117OD x 89 ID 87 OD x 57 ID 59 OD x 33 ID 57 OD x 40 ID
Target
Diameter, mm 20.0 20.4 32.0 39.0 42.0 50.0 50.8 54.0 57.0 60.0 63.5 75.0 76.0
Chromium (Cr)
91006-Cr 91007-Cr 91008-Cr 91009-Cr 91013-Cr 91014-Cr 91015-Cr 91016-Cr 91017-Cr 91010-Cr 91018-Cr 91019-Cr 91020-Cr
91030-Cr 91031-Cr 91032-Cr 91033-Cr
Tungsten (W)
91006-W 91007-W 91008-W 91009-W 91013-W 91014-W 91015-W 91016-W 91017-W 91010-W 91018-W 91019-W 91020-W
91030-W 91031-W 91032-W 91033-W
Carbon (C)
91006-C 91007-C 91008-C 91009-C 91013-C 91014-C 91015-C 91016-C 91017-C 91010-C 91018-C 91019-C 91020-C
Annular Targets (Outside Diameter x Inside Diameter, mm) 117OD x 89 ID 87 OD x 57 ID 59 OD x 33 ID 57 OD x 40 ID
91030-C 91031-C 91032-C 91033-C
Titanium (Ti)
91006-Ti 91007-Ti 91008-Ti 91009-Ti 91013-Ti 91014-Ti 91015-Ti 91016-Ti 91017-Ti 91010-Ti 91018-Ti 91019-Ti 91020-Ti
91030-Ti 91031-Ti 91032-Ti 91033-Ti
91030-Pd 91031-Pd 91032-Pd 91033-Pd
Au/Pd 60:40
91006-AP 91007-AP 91008-AP 91009-AP 91013-AP 91014-AP 91015-AP 91016-AP 91017-AP 91011
91018-AP 91019-AP 91020-AP
91030-AP 91031-AP 91032-AP 91033-AP
EMS Catalog Number Pt/Pd 80:20
91006-PP 91007-PP 91008-PP 91009-PP 91013-PP 91014-PP 91015-PP 91016-PP 91017-PP 91010-PP 91018-PP 91019-PP 91020-PP
91030-PP 91031-PP 91032-PP 91033-PP
Silver (Ag)
91006-Ag 91007-Ag 91008-Ag 91009-Ag 91013-Ag 91014-Ag 91015-Ag 91016-Ag 91917-Ag 91010-Ag 91018-Ag 91019-Ag 91020-Ag
91030-Ag 91031-Ag 91032-Ag 91033-Ag
EMS Catalog Number Iron (Fe)
91006-Fe 91007-Fe 91008-Fe 91009-Fe 91013-Fe 91014-Fe 91015-Fe 91016-Fe 91017-Fe 91010-Fe 91018-Fe 91019-Fe 91020-Fe
91030-Fe 91031-Fe 91032-Fe 91033-Fe
Cobalt (Co)
91006-Co 91007-Co 91008-Co 91009-Co 91013-Co 91014-Co 91015-Co 91016-Co 91917-Co 91010-Co 91018-Co 91019-Co 91020-Co
91030-Co 91031-Co 91032-Co 91033-Co
Nickel (Ni)
91006-Ni 91007-Ni 91008-Ni 91009-Ni 91013-Ni 91014-Ni 91015-Ni 91016-Ni 91917-Ni 91010-Ni 91018-Ni 91019-Ni 91020-Ni
91030-Ni 91031-Ni 91032-Ni 91033-Ni
Iridium (Ir)
91006-Ir 91007-Ir 91008-Ir 91009-Ir 91013-Ir 91014-Ir 91015-Ir 91016-Ir 91917-Ir 91010-Ir 91018-Ir 91019-Ir 91020-Ir
91030-Ir 91031-Ir 91032-Ir 91033-Ir
Molybdenum Magnesium (Mo)
(Mg)
91006-Mo 91007-Mo 91008-Mo 91009-Mo 91013-Mo 91014-Mo 91015-Mo 91016-Mo 91917-Mo 91010-Mo 91018-Mo 91019-Mo 91020-Mo
91030-Mo 91031-Mo 91032-Mo 91033-Mo
91006-Mg 91007-Mg 91008-Mg 91009-Mg 91013-Mg 91014-Mg 91015-Mg 91016-Mg 91917-Mg 91010-Mg 91018-Mg 91019-Mg 91020-Mg
91030-Mg 91031-Mg 91032-Mg 91033-Mg
Copper (Cu)
91006-Cu 91007-Cu 91008-Cu 91009-Cu 91013-Cu 91014-Cu 91015-Cu 91016-Cu 91917-Cu 91010-Cu 91018-Cu 91019-Cu 91020-Cu
91030-Cu 91031-Cu 91032-Cu 91033-Cu
Tantalum (Ta)
91006-Ta 91007-Ta 91008-Ta 91009-Ta 91013-Ta 91014-Ta 91015-Ta 91016-Ta 91917-Ta 91010-Ta 91018-Ta 91019-Ta 91020-Ta
91030-Ta 91031-Ta 91032-Ta 91033-Ta
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