EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS
zzzQ150V Plus Automatic Coater (continued)
SPECIFICATIONS Instrument Case
Weight
Packed Dimensions Work Chamber
Display User interface Sputter Target Specimen stage
Vacuum Rotary Pump
Turbo Pump
Vacuum Measurement Ultimate Vacuum
Sputter Vacuum Range
Processes Sputtering
585 mm W x 470 mm D x 410 mm H (total height with coating head open: 650 mm)
33.4 kg (packed: 42 kg) 725 mm W x 660 mm D x 680 mm H
Borosilicate glass 150 mm ID x 133 mm H
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. V S and V ES versions only
50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.
5 m3 /hr two-stage rotary pump
with oil mist filter. Hydraulically-formed bellows stainless-steel backing line. Internally mounted 70 L/s air-cooled Wide range gauge (10428) mbar
1 x 10-6
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas Pump Down Time
5x10-6 mbar in 30 mins*
Between 5 x 10-3 and 1 x 10-1 for gold targets
mbar
Sputter current 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation
Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures a standard molybdenum boat (supplied) can be fitted
Visual Status Indicator
A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.
The indicator LED shows the following states: • Initialization • Process Running • Idle • Coating in Progress • Process Completed • Process Ended in Fault Condition
Audio indication also sounds on completion of the process. 30
ORDERING INFORMATION Q150V S Plus
5700 each
Q150V S Plus Sputter Coater optimized for high-vacuum applications. High resolution turbomolecular pumped capacitive touch-screen controled sputter coater with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target. A rotating specimen stage, 50 mm diameter, supplied as standard.
Q150V E Plus 5710
each
Q150V E Plus Carbon Evaporator optimized for high-vacuum applications. Turbomolecular pumped capacitive touch-screen controled carborn evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05 mm diameter carbon rods. Supplied with carbon rods (C5422 3.05 mm x 300 mm) and a carbon rod shaper (manual operation). A rotating specimen stage, 50 mm diameter, supplied as standard.
Q150V ES Plus 5720
each
Q150V ES Plus Combined Sputtering and Carbon Coating System optimized for high-vacuum applications. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognizes which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controled sputter coater and carborn evaporator with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target, and high vacuum carbon rod evaporation coater, including quick-release carbon rod insert for 3.05 mm diameter carbon rods. Coating inserts are interchangeable. A rotating specimen stage, 50 mm diameter, supplied as standard. Rotary pump requirements (needs to be ordered separately) 91003
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter
6550-A each
Diaphragm pump. A "dry" alternative to the standard 91003 oil- based rotary pump complete with vacuum hose, coupling kit and oil mist filter
each Options and Accessories
Including details of coating head inserts and specimen stages that are fitted as standard.
Coating head options
A range of interchangeable, plug-in style coating head inserts are available: 3200
Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54 mm x 0.3 mm thick chromium (Cr) target as standard. For additional targets see Sputtering Targets section
3210
3230 3240
3250 3260
3270
Additional sputter insert for quick metal change (V E and V ES versions only).
Note: this is an entire sputtering assembly.
Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical (less wastage).
Carbon fiber evaporation head insert
Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (V E and V ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat.
Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens
each Carbon rod evaporation head insert (for 3.05 mm Ø rods) each
each each
each each each
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