EQUIPMENT & ACCESSORIES CATALOG EDITION V SPUTTER COATERS, SEM/TEM CARBON COATERS zzz RotaQ Rotary-Pumped Coating System (continued)


Specifications Enclosure


Dimensions Weight


Unit Weight


Packed Weight Instrument Size


Instrument Size with


Chamber Open Specimen Stage Short stage:


Tall stage: Chamber Size Ultimate Vacuum


Operational Vacuum Vacuum Gauge Range User Interface USB Connectors


520mm (W) x 286mm (H) x 550mm (L) (+50mm on rear for cables) ~22kg


34 Kg (ES model) 48 Kg (ES model)


440mm (W) x 556mm (H) x 551mm (D) 440mm (W) x 860mm (H) x 551mm (D)


65mm (H) from chamber base, 50mm Ø diameter


145mm (H) from chamber base, 50mm Ø diameter


150mm Ø diameter, 220mm (H) 6 x 10-3 1 x 10-1


mbar mbar


1013 – 1 x 10-4 mbar Touch screen color display


Back-up process log files and recipes easily achievable using a USB Sputter Coater


Sputter Coater (RotaQ S and RotaQ ES) Sputter Target


Specimen Stage Deposition Current Deposition Rate Sputter Timer


Target Disc style, 57mm Ø diameter x 0.1mm (thickness). Au target supplied as standard.


50mm Ø diameter rotating stage 1–150 mA


0.1–20 nm/min (e.g. for Au) 0–60 min


Evaporation Coater (RotaQ E and RotaQ ES) Evaporation Current (rod) Outgas Current Carbon Source Power Supply


5–75A (dependent on process) 1–40A


3.2mm rods or carbon fiber


90V – 240V 50/60 Hz, 1350W including pump


Vacuum specification verified using a Pfeiffer Duo 6 Rotary Pump Ordering Information


RotaQ E Includes: Tilt Stage Assembly, Film Thickness Monitor, Carbon Fiber Woven Cord 1m, Carbon Fiber Insert Assembly, Glass Cylinder Assembly, Accessories Pack, Startup Kit.


Cat No. ROTAQE 10355


10879 Description


Rotary-Pumped Carbon Evaporation Coater Carbon Fiber Insert Assembly & Accessories Carbon Rod Insert & Accessory Kit


Qty. each each


each


RotaQ S Includes: 57mm Dia. X 0.1mm thick Gold (Au) Target, Tilt Stage Extended Height Assembly, Film Thickness Monitor (FTM) Assembly, Extended Height, HP Sputter Insert Assembly, Glass Cylinder Assembly, Accessories Pack, Startup Kit.


Cat No. ROTAQS 4513 3200


Description


Rotary-Pumped Sputter Coater Glow Discharge Insert Assembly Sputter Insert Assembly


Qty. each each each


RotaQ ES Includes: 57mm Dia. X 0.1mm thick Gold (Au) Target, Tilt Stage Assembly, Film Thickness Monitor (FTM), FTM Assembly Extended Height, Stage Drive Shaft Extended Height, Carbon Fiber Woven Cord 1m, Carbon Fiber Insert Assembly, HP Sputter Insert Assembly, Glass Cylinder Assembly, Accessories Pack, Startup Kit.


Cat No.


ROTAQES 10355 10879 4513 3200


Description


Rotary-Pumped Sputter and Evaporation Coater Carbon Fiber Insert Assembly & Accessories Carbon Rod Insert & Accessory Kit Glow Discharge Insert Assembly Sputter Insert Assembly


Rotary Pump Requirements — order separately Cat No. 91003


Description


Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter


Options & Spares — All RotaQ Models Cat No. 27638 33465 11880 3240


Description


Glass chamber 6.5 OD x 220mm Glass cylinder assembly


Extended Height Coating Shield Tilt stage assembly


33814 3350


33591 34338 34315 34321 34323 10362 33872 10359 11856


Pond water Image: Algae colony-Coccolithus: Plant tissue preparation protocol: fixation in 0.1M Glutaraldehyde followed by washing in 0.1M sodium phosphate buffer and water removal in a series of ethanol concentrations (20-100) to finish with Critical Point Drying in K850 and coating with 3 nm of Pt.


4500-15 10808 12305


Tilt stage extended height assembly Rota Cota stage assembly


Rota Cota stage extended height assembly 4" wafer stage assembly with gearbox


4" wafer stage extended height assembly with gearbox Slide stage assembly with gearbox


Slide stage extended height assembly with gearbox Film Thickness Monitor


Film Thickness Monitor, extended height Offset gearbox


14 Place sample stage assembly 9 Place coverslip stage assembly 8 Place stub stage assembly 4 place stub stage assembly


Qty. each each each each each


Qty. each


Qty. each each each each each each each each each each each each each each each each each each


25


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