EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS


zzzQ150T Plus (continued) Cool Magnetron Sputtering


Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The Q150T Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.


The Q150T S Plus and Q150T ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. The Q150T S Plus and Q150T ES Plus are fitted as standard with a chromium (Cr) sputter target. Other targets options include Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al. Others are available on request.


Pulsed cleaning for Aluminum sputtering


Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove, but the Q150T ES Plus & Q150T S Plus have special recipes for Al that reduce the oxide removal time and prevent excessive pre-sputtering of the target.


Interchangeable plug-in heads


This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.


Detachable chamber with built-in implosion guard


Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for carbon evaporation to avoid sample heating, improved uniformity for sputtering and to hold taller samples.


Multiple stage options


The Q150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).


Some examples:


• Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.


• Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.


• Variable angle, rotary planetary stage for heavily contoured samples. • Large flat rotation stage with offset gear box for 4"/100 mm wafers. • Rotation stage for glass microscope slides. Other options are available on request. Safety


The Q150T Plus meets key industry CE standards • All electronic components are protected by covers


• Implosion guard prevents user injury in event of chamber failure


• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened


• Electrical interlocks remove power when source head cover opened • Overheating protection shuts down power supply


Metal evaporation insert (set up for upwards evaporation)


Carbon rod evaporation insert 25


Carbon cord evaporation insert option


Optional glow discharge attachment (for T S and T ES versions)


Sputter coater insert (standard with T S and T ES)


Metal evaporation insert (set up for downwards evaporation)


Pollen coated in 3nm Au x15k magnification on Q150T Plus


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