EMS Equipment & Accessories

EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS

ORDERING INFORMATION (continued) zzzQ150V Plus Automatic Coater (continued)

3280 3290

Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the Q150V Plus when bench depth is limited

Evaporation Supplies each

3300 3320

4513

13530 27691 11880

Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited each Spare quartz crystal for FTM.

each

Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)

Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (VS and V ES only). Can be retrofitted Standard coating shield assembly

Extended glass cylinder assembly, 220 mm H Extended height coating shield assembly

Specimen stages

The Q150V Plus has specimen stages to meet most requirements. All are easy- change, drop-in style (no screws) and are height adjustable (except rotary planetary stage): 3330

Rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment

3340

for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

3350 3360 3370 23850

Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for

15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm

Rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used Tilt stage sub-assembly 4"

Carbon supplies 3500

3510 3520 3530 3540

3550 3560 3570 3580 3590 3595

12097 each each

each each

For our complete selection of specimen stages, please see the Specimen Stage Selection Guide on page 49 >>>>

Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) pack of 10

Carbon rods – 6.15 mm Ø x 50 mm length (shaped) pack of 10

Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10

Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10

Carbon fiber cord – high purity – 1m Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m Manual rod shaper for 6.15 mm Ø carbon rods Manual rod shaper for 3.05 mm Ø carbon rods Wedge Tool

10/pk 10/pk 10/pk 10/pk

each each each each each each each each

each

Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Tilt angle can be preset. 50 mm Ø specimen platform with six stub positions

each each

each each each each

The Q150V S Plus and Q150V ES Plus are fitted as standard with a 0.3 mm thick chromium (Cr) sputter target. Other optional targets: 73830-SP 73810-SP

Tungsten wire baskets – pack of 10 Molybdenum boats – pack of 10

Sputtering Targets

The Q150V S Plus and Q150V ES Plus are fitted as standard with a 0.3 mm thick chromium (Cr) sputter target. Other optional targets: 3410

3410-2 3411

3411-2 3412 3413 3414 3415 3416 3417 3418 3419 3420 3421 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435 3436 3437

57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold

57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper 57 mm Ø x 0.3 mm Chromium 57 mm Ø x 0.5 mm Tungsten 57 mm Ø x 1.5 mm Chromium 57 mm Ø x 0.2 mm Tungsten 54 mm Ø x 1.5 mm Carbon 57 mm Ø x 0.1 mm Aluminum

57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 1.5 mm Titanium

57 mm Ø x 0.3 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Gold

57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.5 mm Titanium 57 mm Ø x 0.1 mm Iron 57 mm Ø x 0.3 mm Iridium 57 mm Ø x 0.1 mm Cobalt 57 mm Ø x 0.1 mm Tin

57 mm Ø x 0.1 mm Molybdenum 57 mm Ø x 0.3 mm Magnesium 57 mm Ø x 0.1 mm Tantalum

57 mm Ø x 3 mm Indium Tin Oxide (90/10)

Other consumables and spare kits 3600

3610 3620 3630

07803 13233 13235 27508 27607 6413

Metal evaporation basket – pack of 10 (for use with metal evaporation head)

Two-year spares kit for Q150V S Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, quartz crystals, O-rings

Two-year spares kit for Q150V E Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings

Two-year spares kit for Q150V ES Plus Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings Basic Oil Mist Filter (spare) Rotary Pump Oil (spare), 1L Rotary Pump Oil (spare), 5L

O-ring (each) 2 required per coater Non-seal L Gasket

Additional Standard Glass Cylinder Assembly

each each each each each each each each each each each each each each each each each each each each each each each each each each each each each each

each each

each each each

each each each each each each each

31

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