EQUIPMENT & ACCESSORIES CATALOG EDITION V SPUTTER COATERS, SEM/TEM CARBON COATERS zzzQ150 GB Turbo-Pumped Sputter Coater/Carbon Coater — For Glove Box (continued) Other options, including FTM and glow discharge


• 3270 extended height chamber (87mm higher than the standard stage) For tall specimens.


• 3290 Film Thickness Monitor (FTM). Consists of a controller and quartz crystal oscillator built into the Q150 GB and a vacuum feed though, chamber mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited.


• 4513 glow discharge insert. Used to modify surface properties (eg hydrophobic to hydrophilic conversion).


ORDERING INFORMATION Q150GB


A modular, high resolution turbomolecular-pumped sputter coater/carbon rod evaporator for glove boxes. Includes: sputtering insert, 54mm Ø x 0.3mm chromium target, carbon rod evaporation insert, carbon rods (3.05mm Ø x 300mm) and carbon rod shaper (manual operation). Fitted with a rotation stage


Rotary pump requirements (needs to be ordered separately) 91003


Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter


91003-E 6550-A


Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter, 220V


Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter


Options, Spares, and Accessories 3230


3240


13137 3210


10455 10879 4513


10358 3350


10458 3280 3260


3270


11880 10068 3290


Carbon rod evaporation head insert (for 3.05mm Ø rods Carbon rod evaporation head insert (for 6.15mm Ø rods)


Carbon fiber evaporation head insert Q150GB Glovebox conversion kit Sputter insert assembly Issue 2


each each


each


each each


Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical 3250


Carbon fiber Insert Assembly and accessories Carbon rod Insert and accessories kit Glow discharge insert Slide stage Issue 1


Rota Cota stage assembly Issue 1 4-inch wafer stage & gearbox Rotating vacuum spigot Issue 1


Metal evaporation and aperture cleaning head insert,


evaporate upwards or downwards. Supplied with a pack of ten tungsten filaments and a molybdenum boat.


Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens Extended Height Coating Shield Q150 Series Glass cylinder assembly 150mm


Film thickness monitor (FTM) attachment.


3300 3320


Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited Spare quartz crystal.


Full range vacuum gauge for low and high vacuum (a low vacuum Pirani gauge is fitted as standard)


each each each each


each each each each each each each each each each each


6802 Glow discharge attachment option


3600 3630


each


During sputtering, optional film thickness monitor (FTM) shown


Metal evaporation basket - pack of 10 (for use with metal evaporation head) Two-year spares kit for Q150 GB


Includes: chromium target, glass cylinder, carbon fiber cord, carbon fiber - fine, carbon rods 3.05mm, quartz crystals, O-rings


Specimen stages 6790-S


6800-S 6801


each each


each


Swinging arm stage drive, a stage drive and positioning mechanism which positions the stage under the correct target. Also provides rotation drive to the stage. Rotation Speed Max 38 rpm Min 14 rpm


Rotating specimen stage for 6" (152 mm) wafers, with rotation variable between preset limits.


Rotating 50 mm Ø specimen stage with adjustable tilt.


The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8" pin stubs. The stage rotation speed is variable between preset limits. The target to stage height is variable between 0 mm and 42 mm for the standard stage. When used with the extended height cylinder the target to stage height would be an additional 87 mm. 50 mm Ø variable height specimen stage with six stub


each each


each


each


positions for 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Stage rotation speed variable between preset limits.


Note: Target to stage height is variable between 10mm and 53mm for the standard stage. The stage is supplied with two mounting pillars; one provides 10mm to 32mm target to stage distance and the other 31mm to 53mm. An adjustable stop is used to set the height. When used with the extended height cylinder (optional accessory) the target to stage height would be an additional 87mm. 6803


50 mm Ø rotary tilting stage.


A rotary planetary style stage with a variable tilt angle from horizontal to 30 degrees. The platform has six positions for either 6.5mm, 10mm and 15mm disc stubs or 1/8" pin stubs. Rotation speed is variable between preset limits.


Note: depending upon specimen height, this stage may require the optional extended height cylinder. 6804


A 90 mm Ø specimen stage for glass microscope slides


(up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six 1/8" SEM pin stubs. The stage rotation speed is variable between preset limits. A gear box is included to allow the optional FTM to be used.


each each


each each


For our complete selection of specimen stages, please see the Specimen Stage Selection Guide on page 47 >>>>


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