EQUIPMENT & ACCESSORIES CATALOG EDITION V LARGE CHAMBER SPUTTER COATERS


zzzQ300T D Plus (continued)


SPECIFICATIONS Instrument Case


Weight


Packed Dimensions Work Chamber


Display User Interface Specimen Stage


A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm


Vacuum Rotary Pump


Turbo Pump


Vacuum Measurement Ultimate Vacuum


Sputter Vacuum Range Processes


Sputter Deposition Current 150 mA Visual Status Indicator


A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.


The indicator LED shows the following states: • Initialization • Process running • Idle • Coating in progress • Process completed • Process ended in fault condition Audio indication also sounds on completion of the process.


Services Gases


Vent Gas


process gas argon, 99.999% Nominal 5psi


Nitrogen (optional). Nominal 5psi 10nm Au on Filter Paper


50L/min two stage rotary pump with oil mist filter


Internally mounted 70L/sec air cooled


Pirani gauge as standard, full range gauge available as an option 5 x 10-5 5x10-3


mbar* to 5x10-2 mbar*


*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas


Pulsed cleaning for Aluminum sputtering


590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) 36 kg (packed: 59kg)


730 mm W x 630 mm D x 690 mm H


Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High


115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display


Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due


Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove. The Q300T D Plus has a special recipe for Aluminum that reduces the oxide removal time and prevents excessive pre-sputtering of the target.


Film thickness monitor


The Q300T D Plus can be fitted with an optional dual film thickness monitor (FTM), which measures the coating thickness on two quartz crystal monitors located within the chamber. The thickness measured on the monitor can be correlated to the thickness on the substrate using a mathematical formula built into the software; this allows the user to control the thickness of material deposited on to the substrate. For example, the Q300T D Plus can automatically terminate a coating profile when the required thickness has been achieved. Alternatively, the process can be terminated by time.


10nm Au on Salbutamol 42


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76