EMS Equipment & Accessories

EQUIPMENT & ACCESSORIES CATALOG EDITION V REPLACEMENT PARTS

Coating Head Options 3200

3210 3230

3240

3250 3260

3270 3280 3290

zzzReplacement Parts & Supplies for Q150T Plus Turbomolecular Pumped Coater Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) 10/pk

Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54 mm x 0.3 mm thick chromium (Cr) target as standard. For additional targets see Sputtering Targets section

Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly.

Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical (less wastage). Carbon fiber evaporation head insert

Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat.

Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens

Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the Q150T Plus when bench depth is limited

3300

13530 27691 3320

4513

Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited Spare quartz crystal for FTM. Standard coating shield assembly

Extended glass cylinder assembly, 220 mm H

Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)

Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted

Specimen stages

The Q150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage): 3330

Rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment

3340 each

Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Tilt angle can be preset. 50 mm Ø specimen platform with six stub positions

for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

3350 3360 3370 23850

Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions

for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm

Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm

Rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used Tilt stage sub-assembly 4"

Evaporation Supplies 73830-SP 73810-SP

Tungsten wire baskets – pack of 10 Molybdenum boats – pack of 10

each each

each each

10/pk 10/pk

each

each each

Carbon rod evaporation head insert (for 3.05 mm Ø rods) each

each each

each each each

Carbon Supplies 3500 3510 3520 3525 3530 3540 3550 3560 3570 3580 3590 3595

12097

Carbon rods – 6.15 mm Ø x 50 mm length (shaped) Carbon rods – 3.05 mm Ø x 50 mm length (shaped

10/pk 10/pk

Carbon rods – 3.05 mm Ø x 100 mm length (unshaped) 10/pk Carbon rods 3.05 mm Ø x 300 mm length (unshaped) 10/pk Carbon fiber cord – high purity – 1m Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m Manual rod shaper for 6.15 mm Ø carbon rods Manual rod shaper for 3.05 mm Ø carbon rods Wedge Tool

each each each each each each each each

Sputtering Targets 3410

3410-2 3411

each each each each

each each

3411-2 3412 3413 3414 3415 3416 3417 3418 3419 3420 3421 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435 3436 3437

57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold

57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper 57 mm Ø x 0.3 mm Chromium 57 mm Ø x 0.5 mm Tungsten 57 mm Ø x 1.5 mm Chromium 57 mm Ø x 0.2 mm Tungsten 54 mm Ø x 1.5 mm Carbon 57 mm Ø x 0.1 mm Aluminum

57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 1.5 mm Titanium

57 mm Ø x 0.3 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Gold

57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.5 mm Titanium 57 mm Ø x 0.1 mm Iron 57 mm Ø x 0.3 mm Iridium 57 mm Ø x 0.1 mm Cobalt 57 mm Ø x 0.1 mm Tin

57 mm Ø x 0.1 mm Molybdenum 57 mm Ø x 0.3 mm Magnesium 57 mm Ø x 0.1 mm Tantalum

57 mm Ø x 3 mm Indium Tin Oxide (90/10)

Other consumables and spare kits 3600

07803 13233 13235 27607 G6260 10068 10429 3610

3620 3630

Metal evaporation basket Basic Oil Mist Filter (spare) Rotary Pump Oil (spare), 1L Rotary Pump Oil (spare), 5L Non-seal L Gasket Glass cylinder 6"

Additional glass cylinder assembly Extended glass cylinder assembly

each each each each each each each each each each each each each each each each each each each each each each each each each each each each each each

10/pk each each each each each each each

Two-year spares kit for Q150T S Plus. Includes: Cr target, glass cylinder, carbon fiber cord, quartz crystals, O-rings

Two-year spares kit for Q150T E Plus. Includes: Cr target, glass cylinder,carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings Two-year spares kit for Q150T ES Plus.

glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings

kit kit

Includes: Cr target, kit

45

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